ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

5 Port Solenoid Valve Series SY3000/5000/7000/9000

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L/M plug L/M plug 4, 2 (A, B) 4, 2 (A, B) 1, 5, 3 1, 5, 3 DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 57 82 connector 108 133 connector 51 53 68 74 connector 101 104 120 125 (sbar) ) (sbar) ) 125 167 Single Single 2 position 2 position 0.81 4.1 3.3 0.33

MY1

80 MY1B100 Tightening torque 25 44 B (max.)

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Air Slide Table

B Max. D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

CV/MVGQ

Description Material Part no. 20 25 32 40 Solenoid valve !5 No. Urethane Bumper A !6 Urethane Bumper B Rod seal NBR PDU-8Z PDU-10Z PDU-12LZ PDU-14LZ #0 !

CV/MVGQ

Description Material Part no. 20 25 32 40 Solenoid valve !5 No. Urethane Bumper A !6 Urethane Bumper B Rod seal NBR PDU-8Z PDU-10Z PDU-12LZ PDU-14LZ #0 !

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

Air Cylinder

D-H7l D-H7C D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5BA D-C7l D-C80 D-C73C D-C80C D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5

MY1

63 50 40 32 25 Mounting position A 278.5 323.5 184.5 229.5 139.5 B 121.5 136.5 95.5 110.5 80.5 Operating range l Note) 5.5 5.5 5 5 5 B A MY1C (Cam follower guide type) (mm) 63 50 40 32 25 Mounting position A 97.5 157.5 127.5 278.5 323.5 B 122.5 182.5 152.5 121.5 136.5 Operating range l Note) 5 5 5 5.5 5.5 B A MY1H (High precision guide type) (mm) 40 32 25 Mounting position A 180 216 131.5

C85

B Band mounting Only 20, 25 Applicable auto switches and bands are shown on page 6-1144.

CQS

With auto switch A 22 22 24.5 27.5 B 36 36 47 50.5 A 27 27 34.5 37.5 B 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 31 31 37 40.5 B + Stroke A + Stroke Bore size (mm) 12 16 20 25 FD FT FV FX FZ L L1 Rod end male thread 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 Flange bracket material: Carbon steel Rod end nut Double clevis style: CQSDS

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc.

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc. MQQ M n n pcs.

JIS Standard Hydraulic Cylinder

C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 40 12 15 52 52 25 to 1400 M10 x 1.25 65 45 12 32 15 36 30 3/8 42 141 11 25 16 16 209 22 38 1/3.5 stroke 50 15 15 55 52 25 to 1400 M10 x 1.25 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 25 45 63 15 20 65 55 25 to 1500 M12 x 1.5

SQ1000/2000

B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 COM () (+) 26 Positive COM spec. Negative COM spec.

CQS

D-A9l, D-F9lWV D-F9 , D-F9lW D-F9N B P D-A9lV D-F9lV D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult SMC for shorter strokes than indicated in the table.

0.4

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of branch type)) (DIN rail clamp screw) R R R BUS 76.7 76.5 12 3 X 3 3 72 BUS IN B X 49.5 B B B B B B B P X P 12 P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.