Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MXQ

2 e !3 !5 MX MTS t !6 r u y w !

Table of Contents

-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

MXW

500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Modular Type Regulator Series AR

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

MXW Series Long Stroke Slide Table

-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

MK

Note 2) Dimensions E and F are 7 mm longer for the auto switches with connector (D-A7C/A80C/J79C).

MK

Note 2) Dimensions E and F are 7 mm longer for the auto switches with connector (D-A7lC, A80C, J79C).

Series PF2W Digital Flow Switch For Water

Lead wire with M12 connector e-con connector e-con connector Part no. Qty. Lead wire length Part no. Qty. Part no. Qty. Part no. Qty.

q"s

E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

MY2

38 EA 8.5 13 EC 9 13.5 EY 36 56.5 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) E 17.5 25 16 Series MY2C Side Support Side support MYC-SA G 2-H C B A F E D H 3.4 4.5 6.6 E 15 25 45 A 60.6 95.9 121.5 F 26 38 64 B 64.6 97.5 121.5 G 4.9 6.4 11.7 C 70.6 107.9 134.5 D 77.2 115.5 145.5 Model MYC-S16A MYC-S25A MYC-S40A Applicable cylinder MY2C16 MY2C25 MY2C40 Guide for Using Side Supports kg

FSQ seies

9h, 8-0 counter bore deplh 7 Bore size 040, 5O/RSI Ora#-Lll D Widlh across tlats: K With locking mechanism r cancel cap/Rs ':O: tr-t ll lE ' Dimensions of lhe model with a cancel cap are the same as lhose shown in the above drawings. > t l U 9 I , o E l l 'Dimensions for the maximum snoqy aDsofpron LNore 4lThe rou shoG an e\tended rr ston tod (Nore 5r'or \tq acrrno, on" oLLl a rrgsd?

76

Trace the arrow mark from the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 102 psi (0.7 MPa) with an ambient temperature 86F (30C) and a relative humidity 60%. The value for E is 144F (62C). 5. Trace the intersection E upward, and trace from the intersection D leftward to obtain the intersection C. 6.

Power Clamp Cylinder

2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !