Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

MQQ

A B C D E F Part no.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

terminal 24, 12, 6, 5, 3 VDC R port P, E port M8 connector G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector W0: Without connector cable M: Common exhaust for the pilot and main valve + + + + + R port P, E port H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO

3 Port Solenoid Valve Series SYJ300/500/700

connector cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

28.7 11 P E 26.5 33.8 44.8 4-M5 (P,E port) P=10 11.5 For latching solenoid or AC solenoid 43.5 300 U side D side Stations 5 4 3 2 1 n 300 42.2 36.3 16.4 12.5 A A 7.5 n-M5 A port Dimensions Equation/ L1=10n+13, L2=10n+7, n:Stations (Max.20 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 23 33 43 53 63 73 83 93 103 113 123 133 143 153 163 173 183 193 203 213 L2 17 27 37

o

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

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Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

Intrinsically Safe Valve

L-type plug connector with cover LL Manual override Nil D E Non-locking push type Terminal type Push-turn locking slotted type Push-turn locking lever type Nut TT Note) Lead wire length Symbol Lead wire length Note 3 6 10 15 20 30 100 300 mm Note) The lead wire of TT-type is connected to the terminal block.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Thermo-chiller

Effective in preventing foreign matter from entering the customer equipment and chiller Step e Press the key to stop operation.

Booster Regulator/Air Tank

Description q O-ring 1 1 (VBA1A) 1 1 (VBA2A) w Hexagon socket head taper screwed plug (For drain port) 1 1 1 e Hexagon socket head cap screw 4 4 (VBA1A) 4 4 (VBA2A) r Anchor bolt/nut 4 Keep the manufacturers certificate of compliance in a safe place. 1030-1 A Air Tank VBAT Series Dimensions VBAT05AN1-E-X105/VBAT05A1-E-X105 VBAT05SN1-E-X105/VBAT05S1-E-X105 Connected to VBA10A, 11A Tank IN

Speed Controller with Indicator

3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

CXT

8 e CXTM Carbon steel Aluminum alloy Hard anodized Hard chrome plated Cylinder tub !

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.