Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 400mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9P--Solid State , Gen.

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: A90--Reed, AC Volt, Horizontal, 0.5M

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: NPT, Stroke: 400mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Lock

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: NPT, Stroke: 400mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Lock

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: NPT, Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: NPT, Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type: -

Uniaxial Electric Actuator Series LJ1

(LJ1S Series only) C D Running accuracy Model C plane to A plane D plane to B plane LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 0.07 or less 0.03 or less 0.09 or less 0.12 or less 0.1 or less 0.1 or less 0.07 or less 0.06 or less 0.03 or less 0.015 or less 0.1 or less 0.1 or less B A Actuator control Programming from a PC Programming and start-up: easy programming is possible by means of the

Electric Actuator with Integrated Guide Series LTF

weight Space saving, light weight 50 40 46 33 60 74 LTF8 work piece mounting section dimensions LTF6 work piece mounting section dimensions 412mm 4.6kg 1000mm Values of the horizontal mounting type with standard motor and 100 mm stroke 357.5mm 2.2kg 600mm Overall length Weight Maximum stroke Table traveling accuracy Table traveling accuracy Lead screw Ground ball screw Rolled ball screw C D

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

IDX-OM-W029

E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64 550 1350 290 388 680 414 50 13 IDU55E 855 1345 1440 R2 470 53 530 360 36 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-2 GWP 6 2 IDX-OM-W029 6 6-4 IDU22E-23 IDU37E-23 GFCI For Option R GFCI R GFCI For

Both series are available in a normally closed or normally open styles.3 port, pilot poppet type valve , Available with power saving circuit to reduce power consumption , Port sizes from 1/8 to 1/2, depending on series , Thread types: Rc, G, NPT, NPTF VNA/B/C/D 2-WAY MEDIA VALVE. DIN CONNECTOR ASSY. VALVE. VNA/B/C/D NO SIZE RATING. 0.06232 lb. 22.

PF2A/PF2W

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73L--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 3M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73L--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 3M, Number: S (1 pc.)

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Number: S (1 pc.)

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C80C--Reed, DC Volt >5 <24, AC Volt <100, Connector, 0.5M