High Vacuum Angle Valve, XL Series

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Safety Instructions

Supply voltage Internal voltage drop of switch Voltage of operation load > Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Body material: Bronze, Stainless steel VXA Cylinder actuation by external pilot air VN LVC LVA Large valve capacity PTFE seal LVH LVD LVQ LQ LVN Wide variations TI/ TIL 2 types N.C., N.O.

VNH

VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping Caution VX3 When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, Teflon tubing, Copper tubing, etc.)

Interface Regulator for VQ4000 5 Port Solenoid Valve

1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035

ZCUK

D-A9V D-M9V D-F9WV Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ( ): Denotes the values of D-M9V, D-F9WV.

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

CG5-S

BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 85 125 40 to 800

CJ5-S

CY Stroke length tolerance Up to 1000 mm, Up to 1500 mm 80, 100 Basic style, Axial foot style, Rod side flange style, Head side flange style, Clevis integrated style MQQ M JIS Symbol Double acting, Single rod Mounting RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

CP95

800 Intermediate strokes are available.

Slider Type/Ball Bushing Bearing

25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm increments up to the maximum strokes.

AME

Inlet pressure (MPa) 14-20-38 3 Super Mist Separator Series AME Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note: Refer to page 14-20-59 for How to Order Bowl Assembly. No.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock: Gray One-touch fitting N.C. auto-drain not available for AMG650.

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2. Discharge the drainage on a regular basis.