VDW Series

Refer to pages 11 and 12 regarding manifold additions. 8 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 Dimensions (mm) 1in = 25.4mm VV2DW2 15 ( 25.5) 1 11 Approx. 300 16 4.6 1 24 33 (19.5) 19.5 R2.3 2-1/4 (IN port) 9 4.5 L1 (: Thread type) L2 L3 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 68 31.5 21 18.5 n-M5 x 0.8 n

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

PF-OMM0004_C

260 g 410 g 720 g 890 g 285 g 335 g 530 g 860 g 1075 g 310 g 360 g 610 g + 385 g 435 g 730 g +85 g 171 3mPas(3 cP) 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 590(7s 690(7s 7,AC250V G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO11791(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () 0100 1 / -10110 1 2 3F.S. 7 s

reduces flow setting time

G thread (Face seal) type is standardized.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 3) Only the metric size is available for the G thread type.

VQ4000

H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide

Refrigerated Air Dryer

800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 97 Refrigerant R407C (HFC) IDFA100F/125F/150F Series For use in Europe, Asia and Oceania (Max. inlet air temperature: 60C, Max. ambient temperature: 45C) How to Order For use in Asia and Oceania IDFA 100F 38 Nil C G K R V Size Size 100F 125F 150F Voltage Option Symbol Note) Description Symbol Voltage Nil C G K

CYV

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide

CNG

Rod Boot Material Stopping Accuracy Unit: mm Piston speed (mm/s) 100 0.3 300 0.6 500 1.0 1000 2.0 Symbol Max. operating temp.

Cylinder with Lock Series CNG

100 0.5 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

Table of Contents

Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

ZSE F/ISE

Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Series CQ2

IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7