Compact and Lightweight

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

Air Slide Table Series MXQ

L L+A Fig. 1 Fig. 2 L 2 1 V E = W ( ) 2 1000 Collision speed V = 1.4 Va Find the kinetic energy E (J) of the load. 1 420 E = 1 ( ) = 0.088 2 1000 V = 1.4 x 300 = 420 Correction factor (reference value) Find the allowable kinetic energy Ea (J).

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Fluoropolymer Piping Equipment

136 127.5 49 22 13 50 55 (E, E) (E, E) L1, L1 L2, L2 Panel hole diameter K Inch Size Model Applicable tubing O.D.

80

D 200 VAC 1.0 1 Size 1 (VDW1) 4 One-touch fitting 1.6 E 230 VAC 1.0 Z Other voltages Brass M5 1.6 1.0 Stainless steel M5 For other special options, refer to page 462. 1.6 A B C D E F G H J 1.6 48 VAC M5 2.3 220 VAC Special voltage 3.2 240 VAC Resin (PPS) (With bracket) 1.6 24 VAC 4 One-touch fitting 2.3 12 VDC 3.2 Deionized water (Seal material: FKM) 1.6 Oil-free VCH 6 One-touch fitting 2.3

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

HRX-OM-S004

Ventilation (H/X inlet) Ball tap Expansion TS E Circulating fluid return port valve A Level switch Expansion Fluid level gauge valve B Customer's E machine Temp. sensor (Ref. discharge (Heat load) Press. sensor (Outlet) TS PS TS Heat Temp. sensor Circulating fluid outlet port exchanger (Outlet) Press. sensor (Ref. low press.)

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For manifold type 31, S31, 32, S32 Body option 5 port 0: Pilot valve individual exhaust for the pilot valve 3: Common exhaust type for main and pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

2/3 Port Valve

FPM/EPR e Stainless steel, FPM Stainless steel, Brass NBR Note 1) Dew point: 10C or less. Note 2) 50cSt or less. Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.

PSxx-OMT0001CN

OUT (6)OUT (0.3 Nm) -63No.PS-OMT0001CN-E 5 -64No.PS-OMT0001CN-E 5 ,,, (), (100 kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2 (OUT2) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) -66No.PS-OMT0001CN-E 5 [ON/OFF] [] () [kPa] -67No.PS-OMT0001CN-E

Stopper Cylinder

0 w q e r t u !

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63