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AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

-H Lead wire with connector (ZS-33-D) Connector cover (ZS-33-F) Attached the connector cover -68No.PF-OMP0002-H Revision history A: Modified errors in text.

(example: If the pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5V, the detected voltage by the A/D converter becomes 5(V) x 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance The operation principle of the switch output. Normal output and reverse output can be selected.

-) DC(+) OUT1 OUT2 -A NPN 2 Max.28 V80 mA 1 V FUNC DC(-) DC(+) OUT1 OUT2 -B PNP 2 Max.80 mA 1 V FUNC DC(-) -19No.PS-OML0002CN-G DC(+) OUT1 -C OUT2 NPN 1 Max.28 V80 mA 1 V 1 k FUNC DC(-) DC(+) -D OUT1 NPN 1 Max.28 V80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1

Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) VY1 IR2020-02 IR2020-02 IR2020-02 Supply pressure 1.0 MPa Back pressure: 1.0 MPa 1.0 G 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 PPA Set pressure (MPa) Set pressure (MPa) 0.6 0.202 0.7 Set point 0.5 AL 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6

NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF -17- Step No. 1: Positioning operation a b c d e f g h i j k [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

x n +4 x (n -1) -57No.PS-OMM0002CN-F A B C D E 4 OFF F SMC URL http://www.smcworld.com 2008-2014 SMC Corporation All Rights Reserved No.PS-OMM0002CN-F

If using straight entry piping type, the material of piping and tubing need to be taken into consideration when deciding panel cut-out spacing. -83No.PF-OMO0005-F Bracket (ZS-33-M) Bracket (ZS-33-MS) Lead wire with connector (ZS-33-D) -84No.PF-OMO0005-F Revision history A: Modified errors in text. B: Revision. C: Contents revised in several place. D: Contents revised in several places.

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02

[P_2][n_2][] [H_2][] [F 2] OUT2 OUT1 -40No.PF-OMO0004CN-E b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 OUT1 -41No.PF-OMO0004CN-E c. 0999,999,999 L 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -42No.PF-OMO0004CN-E d.

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

Spaces needed for maintenance Front : 600 mm Rear : 600 mm Top : 600 mm Right : 600 mm Left : 600 mm Locations the ventilation grille of the product can be blocked. Place where rejection style air of air compressor or other driers (hot wind) is inhaled. Condition which has sudden pressure/flow rate changes.

mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN (IN) IDU-BP336 1 IDU22E (OUT) IDU-BP337 1 IDU37E 1 IDU55E IDU-BP338 1 IDU75E 2 2 4 10mm IDU Series 2-2 2 2 IDX-OM-W029 2 2 2 5 6-1 IEC AC230V [30mA 10AIDU75E 20A] AC200V [30mA 10AIDU75E 15A] 216AWG 812 3 () 1.25 0.2m 30m

Necessary maintenance space Front: 2feet (600 mm) Back: 2feet (600 mm) Top: 2feet (600 mm) Right side: 2feet (600 mm) Left side: 2feet (600 mm) Avoid locations where the ventilation grille is obstructed. Avoid locations where the air dryer will draw in high-temperature air discharged from an air compressor or other dryer.