Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number of needle

FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

-4300-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

-4300-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

-4300-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

-4300-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Table of Contents

l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best

Dual Speed Controller with One-touch Fitting Series ASD 1

-07S 43.9 25.6 13.2 18 55 18.5 5/16" ASD430F-N02-09S 46.5 28.2 41.7 NPT 1/4 17.5 15.2 15 18.5 36.7 29.6 34.6 11 40.4 35.4 21 3/8" ASD430F-N02-11S 49.3 31 19.7 62 18.5 17 1/4" ASD530F-N02-07S 48.7 25.6 13.2 20.3 76 18.5 5/16" ASD530F-N02-09S 51.3 28.2 46.9 NPT 1/4 38 19 15.2 19.8 23 43 15.4 41.9 48.8 43.8 21 3/8" ASD530F-N02-11S 54.1 84 32.6 23.1 18.5 17 1/4" ASD530F-N03-07S 48.7 25.6 13.2

ASD

-07S 17 13.2 43.9 25.6 55 18 AK 5/16" NPT1/4 ASD430F-N02-09S 18.5 15.2 46.5 28.2 36.7 41.7 34.6 17.5 40.4 29.6 35.4 18.5 15 11 19.7 3/8" ASD430F-N02-11S 62 21 18.5 49.3 31 ASS 1/4" ASD530F-N02-07S 17 13.2 48.7 25.6 20.3 76 5/16" NPT1/4 ASD530F-N02-09S 43 18.5 15.2 51.3 28.2 41.9 48.8 38 43.8 15.4 46.9 19 23 19.8 23.1 3/8" 84 ASD530F-N02-11S 21 18.5 54.1 32.6 1/4" ASD530F-N03-07S 17 13.2 48.7

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

ARJ310

min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01 y e !

Miniature Regulator Series ARJ310

min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01 y e !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification Piping direction 1.5 02: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03

AFF

AFF2B AFF22B AFF75A 1 8B 2 3 4B B Max. flow line 0.1 MPa 0.1 MPa 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.