CJ2

B C d H NTJ-010A 7 8.1 M4 x 0.7 3.2 8 9.2 M5 x 0.8 4 NTJ-015A Refer to page 6-3-11 for details of the mounting nut.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

VFR

stations 7 stations 7 stations 7 stations M2.6 x 0.45 Max. 8 stations Max. 8 stations Max. 8 stations Max. 8 stations Except VFR5000 Except VFR5000 Note 1) Maximum number is 8 stations.

Table of Contents

7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

C76

7 !

C76

7 !

Refrigerated Air Dryers

air temperature [C] 55 Symbol Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Refrigerated air dryer Power supply voltage (Frequency) *5 Single-phase: 100 VAC (50 Hz), 100/110 VAC (60 Hz) *5 Single-phase: 200 VAC (50 Hz), 200/220 VAC (60 Hz) Single-phase: 230 VAC 10% (50 Hz) Auto drain Single-phase 100 V 180/202 208/236 385/440 *7 250/290 *7 425/470 *7 460/530 Single-phase

Thermo-chiller/Rack Mount Type

5 to 35 Cooling capacity (50/60 Hz)3 [W] 1000/1200 1600/1800 1000/1200 1600/1800 Heating capacity (50/60 Hz)4 [W] 400 500 Temperature stability5 [C] 0.1 Pump capacity (50/60 Hz)6 [MPa] 0.13 (at 7 L/min)/0.18 (at 7 L/min) For Options T, MT: 0.36 (at 7 L/min)/0.42 (at 10 L/min) Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 7/10 Flow display range21 [L/min] 2 to 16 Electric conductivity

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

7

DC Specification DC Specification Class B Class B Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 4.5 50 7.5 60 7 55 8.5 70 10.5 65 12.5 70 Class H Class H Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (

HRX-OM-X037

Alarm Notifications and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Operation of this product when an alarm occurs . 7-1 7.3 Troubleshooting . 7-2 7.3.1 Alarm contents, causes, and troubleshooting . 7-2 7.4 Other Errors . 7-5 HRL Series HRX-OM-X037 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection

SYJ3000/5000/7000

Refer to page 1-7-4.)

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !