Series KP/KPQ/KPG

37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

KP/KPQ/KPG

37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Male Elbow: KPQL

Aluminum High Vacuum Angle Valve

Temperature distribution of 120C specifications Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 140 e, r, t Comparison with KF25 flange 120 e Body 1 100 Temperature (C) 80 r Body 2 q, w t Body 3 60 40 20 w Bellows Valve q 0 0 30 60 90 Heater Time (minutes) High Vacuum Angle Valves

E-P HYREG

VBA VBAT Cylinder Thrust Control Tension control balancer 2(A) 3(R) AP100 Air Flow Control of Nozzle Note) Example Auto balancer 1(P) Air blowing Air cooling 2(A) 3(R) 1(P) Automatic adjustments Pressure Control of Tank 3(R) 3(R) Flow Control of Various Fluids 2(A) 2(A) 1(P) 1(P) For remote control of another air operated valve Nozzle 3(R) 2(A) Note) Use for the sonic flow. 3(R) 1(P) 2(A)

energy saving effect

Applicable model -A -W HRSH100--20-S HRSH150--20-S HRSH200--20-S HRSH250--20-S HRSH300-A-20-S HEB HED HEA IDH 179 HRSH Series Optional Accessories q Piping Conversion Fitting This is a fitting to change the port from Rc to G or NPT.

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Air Cylinder

CS1 CS2 Direct Mount Type (CG1R, CG1KR) (mm) D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-H7lW D-H7NF D-H7BA D-H7l D-H7C Auto switch model D-C7l D-C80 D-C73C D-C80C D-G59F D-G5NT D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 12 24 8 20 7.5 19.5 8.5 20.5 4 16 2.5 14.5 5.5 17.5 25 11.5 24.5 7.5 20.5 7 20 8 21 3.5 16.5 2 15 5 18 32 13 25 9 21 8.5 20.5 9.5 21.5 5 17

5

MQ D-G5, K5, G5lW D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8 20 to 63 RHC 8.5 Auto switch 12 Auto switch Hs Hs RZQ 24.5 16 B 33 A B 26 A D-H7l, H7lW D-H7NF 20 to 63 D-C73C, C80C 20 to 63 8.5 Auto switch 8.5 Auto switch Hs Hs 16 16 B 29 A B 36.7 A D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 12 Auto switch Hs 8.5 Auto switch Hs 24.5 16 B 38.2 A B 33 A (mm) Auto Switch Mounting Height Auto Switch

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Seal kit includes a grease pack (10 g). When !5 or !6 is shipped independently, a grease pack (20 g) is included. Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 1213 A MY1H Series Construction End lock !9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

air-filter-e

Order Example Element number for FGGSB-20-B002NA A Check the product number of the industrial filter.

Air Preparation Equipment

Order Example Element number for FGGSB-20-B002NA A Check the product number of the industrial filter.

3

Basic (mm) (mm) A B C D E F Yh9 H 25 29 32 38 15.5 20 5 7 M3 x 0.5 M5 x 0.8 5.5 6.5 6 8 MKB12-Z MKB16-Z Clamp stroke Model 11 14 Rod state Model 0 0.043 0 0.043 20 mm Q R 88 115.5 88 115.5 30 mm Q R 108 145.5 108 145.5 10 mm Q R 68 85.5 68 85.5 Retracted Extended Retracted Extended MKB12-Z 45.5 55.5 65.5 MK MK MKB16-Z 45.5 55.5 65.5 MK2T Note) The above figure is with the auto switch (D-M9

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

REA/REB

Speed 600 mm/s D 20, 25, 32, 40 Attached from top with cap bolt Floating block L LA A Attached from bottom with cap bolt XB WF 2-SS (helical insert thread) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1) HB Note 1) High Precision Guide Type REBH Switch rail FC D' Section D-D' (mm) FF Note 1) FE Note 1) FC BA BB CC A Bore size FH HB Note 1) SS FG MD R Note 2) LF XB HL L LA S WF XA 10

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A Rear flange: CBM2G Bore size Stroke -H -R -W N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Front trunnion: CBM2U Bore size Stroke A Rear trunnion: CBM2T Bore size Stroke -H -R -W N L -H -R -W N L A (mm) Axial foot Rear flange Bore size (mm) Z LS ZZ Double lock 152

Floating Joint

24 38 42 2 2.5 3 2.8 5.2 9 18 18 22 20 22 24 41 46 55 60 73.5 86 Foot Type: JAHL JAHL40, 50 Center of sphere x R JAHL63 to 100 x Center of sphere R (mm) Maximum operating tension and compression force (N) Applicable bore size (mm) Model Nominal size Pitch M A Center of sphere R Standard: Heavy Load Type Hydraulic: Up to 7 MPa Allowable eccentricity U Maximum thread depth P Weight (kg) B

Table of Contents

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

JA/JAH/JB/JS

22 20 22 24 41 46 55 RS H A RZQ Foot Style: JAHL MI W S JAHL40, 50 Center of sphere CEP1 CE1 CE2 ML2B R C J G5-S JAHL63 to 100 Center of sphere CV MVGQ CC RB R J (mm) Maximum operating tension and compression force (N) M Allowable eccentricity U Center of sphere R Applicable bore size (mm) Model Maximum thread depth P DWeight (kg) A B C D E F K L T N J G H Nominal size Pitch -X Standard