Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC ASR ASQ 669 AS-FG Series Construction Elbow type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread e e !0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

(AC24V) t t t t t Non plug-in type Manifold stations us. Efectiae Orifice Area (Cu-Factor) Porting/No. of stations First station I Fifth station Tenth station Fifteenth station P-A or B 0.72 0.72 0.71 0.70 A-EA, B.EB 0.9 0.9 0.9 2 position sjngle.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

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T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VCA

Coil specifications VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil insulation type Class B Power consumption DC VCA 2: 6.5 W, VCA 3: 8 W, VCA 4: 11.5 W VX3 50 Hz (1) VCA 2: 7.5 VA, VCA 3: 10 VA, VCA 4: 13 VA Apparent power AC VXA 60 Hz Note 1) Since AC coil

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

IIIIIII

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 10 XLF/XLFV Series Air Operated, With Solenoid Valve Solenoid valve How to Order [Option] w XLFV 16 2 G M9N A y 1 G q e i r t u o !

Pulse Valve

Description Material 1 Body ADC 8 Seal NBR 2 Main valve Resin 9 Washer Fe (Chromated) 3 O-ring NBR 10 Compression nut ADC 4 Bonnet ADC 11 Hexagon bolt Stainless steel 5 Sub-valve Resin 6 O-ring NBR 7 Bonnet ADC JSXFAF/Direct Piping Type Port size: Sizes 06, 10 Port size: Size 14 i u y t t r r e e w IN w IN q q Component Parts Component Parts No.

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

(Metal Body) Series AS-M Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !

Industrial Filters

) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate