Air cylinder (Series compatible with secondary batteries)

If the drain bowl is difficult to check and remove, installation of a drain bowl with an auto drain option is recommended. Use clean air. Do not use compressed air that contains chemicals, synthetic oils including organic solvents, salt or corrosive gases, etc,as it can cause damage or malfunction. 4 C a u t i o n Install an air filter. Install an air filter upstream near the valve.

High Purity Fluoropolymer

Model M E L M H t W1 W2 K J 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 6 11 13 44 10.5 8 10 16.5 15 17 55.5 14.5 8 6 14 15 J Panel thickness (Max. t) 23 21 24 69 20.5 8 7 17 20 W2 W1 M 28 26 28 78.5 24.5 8 7 21 24 1/4 (E) (E) H 39 39 43 100 36.5 9 9 26 29 (L) Class 2 to 5 Panel aperture K 49

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

8 w $4 t e $2 !5 $3 y!7 @8 !4 !

VQ5000

Mixed single and double wiring is available as an option. Master station PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations T unit Can be connected with PLC I/O card for serial transmission.

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

C85

2 t !7 q !4 !1 w e !3 !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

48

Dual Rod Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Cylinder suitable for pushing , lifting , or clamping 48% Reduced by up to Overall length 59.5 mm 114 mm JMGPM25 20 mm stroke (20 x 2)1 CXSM20 20 mm stroke (20 x 2)1 JMGP25 CXSM20 59.5 mm 38% Reduced by up to 54.5 mm shorter (Compared at a 20 mm stroke) Weight 0.8 kg 1.28 kg CXSM32 25 mm stroke (32 x 2)1 JMGPM40 25 mm stroke (

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

NCY2 series

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

E-P HYREG

4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901 Command signal voltage (current) for starting

7.4

For manifold optional parts, refer to pages 755 to 757. 20 20 stations Cylinder port size Connector individual wiring Symbol Port size Manifold pitch M5 M5 thread C2 With 2 One-touch fitting C3 With 3.2 One-touch fitting C4 With 4 One-touch fitting CM Mixed sizes and with port plug Note) P, R port thread type Metric Symbol Manifold pitch 8.5 7.5 Nil Rc M5 F G N NPT T NPTF 8.5 N1 With 1/

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

AC Servo Motor Driver (CC-Link Type)

An error code is returned if an instruction code outside the range set in parameter No.