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The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5 55.5 103 121.5

A Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions. CM2 C85 Construction (Disassembly is not possible.) CG1 Piping Caution Panel mounting MB q Use a dedicated hose nipple. On the panel mounting style, use the CJ-5H-4 or CJ-5H-6, a dedicated hose nipple (with a fixed restriction) that is provided.

L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA

Refer to page 17-3-65 for ordering a coil only.

-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts are in both English and Japanese.

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Never mount the product in a place that will be used as a scaffold during piping.

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4

A N NB lB H S + Stroke ZZ + Stroke Locking at rod end: MBBB Rl Bore size Stroke Locking at both ends: MBBB Wl Bore size Stroke Hl/Rl (mm) Width across flats Bore size (mm) Effective thread length Stroke range (mm) MM MB MA LL K J HN HR H GB G F E DL D lC lB A 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18

30 msec. -22No.PF-OMO0004CN-E PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V) PFMB7--EPNP(1 )(420 mA) PFMB7--FDC(+) OUT1 DC(-) 80 mA 1.5 V E15 V 1 k F420 mA 600 PNP(1 ) PFMB7--HDC(+) OUT1 DC(-) 80 mA 1.5 V 0.4V ()30 msec. -23No.PF-OMO0004CN-E NPN(2 ) PFMB7--ANPN(1 ) PFMB7--CPFMB7--DNPN(1 ) PFMB7--GOUT1 OUT2 (PFMC7--A-) DC(-) PNP(2 ) PFMB7--BNPN(1 ) PFMB7--EPFMB7--FPNP

Approximately 6.2 k TR Switch DICOM 24 V DC 10% 300 mA Approximately 5 mA VCES 1.0 V ICEO 100 A (2) Digital output interface DO-1 This is a circuit of the emitter output terminal of the output transistor. When the output transistor is turned on, current will be applied from the output to a load. A maximum of 2.6 V voltage drop occurs in the driver.

0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)