Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

MNB

40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10

MNB

75 1/4 40 120.5 65 46.5 104.5 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 32 18 9 Up to 600 90 1/4 20 45 134.5 75 56.5 119.5 17.5 23 68 35 27 14 20 14 12 80 19 13 37 22 11.5 Up to 750 102 1/4 30 45 169 95 72 150 33 22 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z

3 Port Solenoid Valve

holding) with power saving circuit Note 1) Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

One-touch Fittings

P.13 P.19 Different Diameter Tee Male Elbow KQ2T Use to connect tubing of reduced size for branching at both 90 angles. KQ2L-G Use to pipe a female thread at right angles. Most general model. P.14 P.8 Male Run Tee Union Elbow KQ2Y-G Use to branch a female thread in the same direction and at a 90 angle. KQ2L Use to connect tubing at right angles.

Compact Type Dual-Rod Cylinder Series CXSJ

) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

CEx-OMG0106

Note: Please take note at piping, which may lead to opposite setting. No.3The Change of Counter Direction OFFGoing to left will be an increment on counter. The origin is set to be at right. ONGoing to right will be an increment on counter. The origin is set to be at left.

MG

weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20

STAINLESS STEEL CYLINDER

Port side side Minimum stroke 10 20 75 15 3.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D Not available at 80 and 100. Note) Mounting brackets are not mounted and are supplied loose at the time of shipment. Thread type Nil TN TF Rc NPT G Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Mounting brackets are not mounted and are supplied loose at the time of shipment. Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm Cylinder stroke (mm) Refer to "Standard Stroke" on page 10-4-3.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Seal the unused "R" port at the end of the manifold.

VQ4000

the bottom. 50 mA at 24 VAC, DC or less 20 mA at 100 VAC, DC Max. operating current Note 1) Rated voltage: 24 VDC to 100 VAC Internal voltage drop: 4 V Note 2) Combination of VQ41 (Single) and release valve spacer can be used as air release valve.

IDU/IDF

1.0 18.2 3.0 = 15.2g/m 20 1.5 15 10 5 3.0 0 20 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C [Example] If air at 30C and 60% humidity is pressurized to 0.7MPa, the dew point of the air will be 62C. ( ) If this is cooled to 25C, the amount of condensed water generated will be 15.2g/m. ( ) Therefore,

Clean Air Module

Pressure is measured at the pressure outlet port.

ARM10/11

MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

ARM10/11

MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

TUH Series

At higher temperatures, breakage or flattening, etc., may occur at more than the minimum bending radius.

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16