Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R port P, E port D: Push-turn locking slotted type Port size Electrical entry Nil: Without sub-plate 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC Grommet L plug connector M plug connector 24, 12 VDC 100, 110, 200, 220 VAC DIN terminal G: Lead wire length 300 mm L: With lead wire (Length 300 mm) D, Y: With connector WO: Without connector cable MN: Without lead

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Switch Pressure range 100 kPa 0 100 kPa 500 kPa 1 MPa ZSE20 ZSE20A ZSE20B ZSE20B-L 101 kPa 0 For vacuum pressure 100 kPa 0 105 kPa 10 kPa ZSE20F ZSE20AF ZSE20BF ZSE20BF-L 100 kPa 100 kPa For compound pressure 100 kPa 100 kPa 105 kPa 105 kPa ISE20 ISE20A ISE20B ISE20B-L 100 kPa 1 MPa For positive pressure 105 kPa (0.105 MPa) 1.05 MPa 0 1 MPa Rated pressure range of the switch Set pressure

MHZ

0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa 80 0.5 MPa 0.5 MPa 60 0.4 MPa 0.3 MPa 0.4 MPa 0.3 MPa 40 0.2 MPa 0.2 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-6 6 Model Selection Series MHZ Effective Gripping

MHZ

N) MHT 0.6 MPa 0.6 MPa 8 0.5 MPa 0.5 MPa 150 0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

15 10 0 0.01 0 0.1 10 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100

MY2

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

CG1

90.4 CD-G06 74 46 46 (247+l) 281.5+l 223+l (237+l) 214 (228) 272.5 80 11 110 64 IY-G08 72 85 45 (286.5) (295.5+l) 307.5+l 231+l (245+l) 222 (236) 298.5 100 12 130 72 IY-G10 93 100 60 (312.5) (321.5+l) Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Stroke adjusting range Piston Speed 40 Without stroke adjusting unit 16 25 Bore size (mm) Note 1) 100 to 1000 mm/s L unit and H unit Stroke adjusting unit 100 to 1500 mm/s Note 1) When exceeding the air cushion stroke ranges on page 8-13-10, the piston speed should be 100 to 200 mm/s. Note 2) Use at a piston speed within the absorption capacity range. Refer to page 8-13-10.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA 40, 50, 63, 80, 100, 125, 160 3.5MPa How to Order Bore size 40 50 63 80 100 125 160 40mm 50mm 63mm 80mm 100mm 125mm 160mm Aluminum tube Steel tube Tube material Aluminum alloy Steel tube Nil F Without auto switch Nil Auto switch type CHA 40 100 L L With Auto Switch Select applicable auto switch models from

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

1.63

10 100 -X Eccentric distance L (mm) 507 MGPW Series L L m m Horizontal Mounting Slide bearing MGPWM20 to 63 (17) L = 50 mm, V = 200 mm/s or less (18) L = 100 mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

Cylinder with Lock

100 63 63 50 50 40 40 80 80 100 100 100 100 Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

VQZ1000/2000/3000

plug connector (L) 3 position exhaust center VQD (A) 4 (B) 2 Non-locking push type (Tool required) VQZ3000 1 (P) 3 (R2) 5 (R1) (Standard) 12 VDC 24 VDC Body Ported 3 position pressure center 2.4 3.2 L plug connector (L) (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) M plug connector (M) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) 0.54 0.71 (A) 4 Locking type (Tool required) DIN

HRS100/150

] 200 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Acid consumption amount (at pH4.8) [mg/L] 100 or less v Iron (Fe) [mg/L] 0.3 or less v v Reference item Total hardness [mg/L] 200 or less v Copper (Cu) [mg/L] 0.1 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ionic state silica (SiO2) [mg/L] 50 or less v Ammonium ion (

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158