SYA3000/5000/7000

, N7 C8, N9 1/8 (A, B port) M5 x 0.8 (Pilot port) 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Manual override (Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center / exhaust center / pressure center SYA5 20(-F2) C4, N3 C6

5 Port Air Operated Valve SYA3000/5000/7000 Series

C6, N7 C8, N9 1/8 (A, B port) M5 x 0.8 (Pilot port) SYA SYA SYJA VZA 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" VFA 2 x 3.2 (For mounting) VFRA VPA4 SYJA VZA VTA VGA 1/8 (P , EA, EB port) 1.8 (Ventilation hole) Manual override (Non-locking) VPA VPA3 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

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12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Compact Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

REA/REB

6 6 6 9 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Fieldbus System

P-tight screw (4 x 14) 2 pcs. w Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for SY series) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs.

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Sine Rodless Cylinder Series REA/REB

Operating Range (mm) Bore size (mm) Auto switch model 10 25 15 20 32 40 D-A7, A8 6 6 6 6 6 6 D-F7, J7, F79F 3 3 4 3 3 3.5 Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion) There may be the case it will vary substantially depending on an ambient environment.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(-F2) L 143.4 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 (71.7) Cable type (TT) 52-SY5220-TT-01 (-F2) Max.10 L (Lead wire length) 177 Lead wire marking No.1 (+), No.2 () 0.75 mm2 (88.5) 6 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 3-position closed centre/ exhaust centre/pressure centre L plug connector (L) 22.6 16.7 3 52-SY5420-L