3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

port} (A) 2 N.C.

25

Diaphragm Assembled in a clean room.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

NVZseies

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

3 Way,3 Port Solenoid Valve NVZ Series

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VXA21/22

Option Symbol and Configuration Fluid and Options Option symbol and body material Brass Stainless steel Option Symbol Seal material Body material Holder material (Driving parts) Fluid(Application) V M Silicon oil A H Standard A B G H J M (Non-leak) N P V (Non-leak) NBR FPM EPR NBR FPM EPR FPM FPM EPR FPM Vacuum (Up to 103Torr) Fuel oil (Up to 60C) Brass A H Polyacetal V M Insulating oil A

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

TABLE OF CONTENTS

Body w/shoulder 1 9/16 Housing A Stop) 1-2WNO G-1/32 We Require full description In A.C.

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

ZSE40/ISE40

threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa A ridge shape has been created as a Uni thread for common applications for Rc, G, NPT and NPTF.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

AS ASP Specifications ASN Fluid Air AQ Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa ASV Proof pressure 1.5 MPa 5 to 60C (No freezing) Ambient and fluid temperature AK A ridge shape has been created as a Uni thread for common applications for Rc, G, NPT and NPTF.

PF2A/PF2W

470 g 650 g 1,100 g Port size (Rc, NPT, G) Note 1) The system accuracy when combined with PF2W3.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A Part No.