MHZ

Normally open Symbol Piping port location MHZJ2-10 MHZ Normally closed Side ported E M3 x 0.5 M5 x 0.8 W MHF With 4 One-touch fitting for coaxial tubing Axial ported K With 4 One-touch fitting M MHL M5 x 0.8 MHR Side Ported [E] MHK (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A MHS 0.016 0.043 40 7 MHZJ2-10E 12f8 11 15 D2 MHC 0.016 0.043

MHZ

model MHZJ2-16 MHZJ2-20 MHZJ2-25 Double acting Single acting Normally open Symbol Piping port location MHZJ2-10 MHZ Normally closed Side ported E M3 x 0.5 M5 x 0.8 W MHF With 4 One-touch fitting for coaxial tubing Axial ported K With 4 One-touch fitting M MHL M5 x 0.8 MHR Side Ported [E] MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

Vacuum Module Series ZX

Vacuum switch (E) (D) External release port E P F D Nil Model ZX1 K6 Pilot port Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1 K6-E (Release to atmospheric pressure) Pressure sensor Port exhaust 78 29.2 Spacer 1 (ZX1-S1) (For side mounting) Rc 1/8 EXH port (EXH.) 2 13 Filter unit (F) M5 Pilot port 41 1 21.6 51 10 20 Without switch and filter M5 External release port Ejector

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

•

'A B C J O E F H:MSxna !H:M6xl ! Y ~..Rat type Rat wfIh rib Deep type Bellows type G I G Flat R a1wi1h.ri!> M. M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

C85

1 y q r e i !2 o !

C85

1 w e !3 !

Parallel Style Air Gripper Series MHZ

Normally open Normally closed Piping port location Symbol MHZJ2-10 MHZJ2-16 MHZJ2-20 MHZJ2-25 E W K M M3 x 0.5 M5 x 0.8 Side ported With 4 One-touch fitting for coaxial tubing With 4 One-touch fitting Axial ported M5 x 0.8 Side Ported [E] (mm) End boss assembly Auto switch mounting groove (4 locations) (Except 10) D1 E D2 B Model A 0.016 0.043 12f8 40 11 7 15 MHZJ2-10E D2 0.016 0.043 16f8

Hydraulic

Example: M5 x 50l 4pcs.

7.5

For built-in silencers, the 3/5(E) ports are plugged.

Table of Contents

2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5

Table of Contents

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Applicable series M5 Symbol Part no.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A