VHK

(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

ZCUK

F9BWV 2-wire Relay, PLC IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

modular-press-e

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assenbly SY100-77-1A VZ P R 20 stations 20 R port VS A port M5 X 0.8 P port M3 X 0.5 M5 X 0.8 M5 X 0.8 Note 1) SY114 (A) and SY124 (A) cannot be mounted on the same manifold.

RSH/RS1H

MI W S Axial direction The retardation value can be changed by rotating the adjustment dial. CEP1 Adjustment dial Option CE1 With cancel cap With lever detection switch With lock mechanism V m/min CE2 Work W Work W Work W ON OFF ML2B Work W Work W Cancel cap Drag C J G5-S Lever detection switch CV Bracket MVGQ The cancel cap holds the lever horizontally allowing a pallet to pass.

RSH/RS1H

MI W S Axial direction The retardation value can be changed by rotating the adjustment dial. CEP1 Adjustment dial Option CE1 With cancel cap With lever detection switch With lock mechanism V m/min CE2 Work W Work W Work W ON OFF ML2B Work W Work W Cancel cap Drag C J G5-S Lever detection switch CV Bracket MVGQ The cancel cap holds the lever horizontally allowing a pallet to pass.

LEF-OM002xx

0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Series VCL

: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Applicable load Type Load voltage Auto switch model Band mounting DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Lead wire length (m) Wiring (Output) Electrical entry Indicator light M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 2) Auto switches marked with are produced upon receipt of order.