Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

ZSE1/ISE1

ZSE1-01-15CN1 pc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

Title not found

A or less 24 VDCj 10pA or less 1.5 V or less (10mA: 0.8 V of less) 24 VOCj 1opA or less R e d : O N 1 mS or less solid state switch 3 Wirc lC circuit 28 VDC l5OmA 0.8 V or less 2 V or less (10mA: 0.8 V or less) 24 VDC: 10pA or less 24 VDC] 10llA or less ON: red light emilUng diode ON: red lighl milling diode 1 mS or less ftlo$I{ildl Smies CIA Reed Type Internal Circuit D-A59W.

KG

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

KJ

P . 27 P . 28 KQ2L KQ2U Use to branch line in the same direction. How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

Fieldbus system PROFIBUS DP compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -50No.EX-OMN0028

PSxx-OMH0002CN

OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

EXxx-OMS0026CN

1.0 W (SMC ) HOLD / CLEAR / ON 1 IP67() -1050 -2060 3585%RH( AC500 V1 FE DC500 V10 M FE 1057 Hz0.75 mm p-p 2 57150 Hz49 m/s XYZ 2 ( 2 XYZ 3 () 147 m/s CE UL(CSA)RoHS 300 g 1 -25No.EX-OMS0026CN -26No.EX-OMS0026CN EX600-ED D DIN 2 DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V()

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Digital Pressure Switch ( compatible)

1.5 V or less (Load current 80 mA) Delay time 1 1.5 ms or less, Variable at 0 to 60 s/0.01 s step Hysteresis Hysteresis mode Variable from 0 2 Window comparator mode Short circuit protection Provided -92No.PS-OMX0002-A ZSE20C ZSE20CF ISE20C ISE20CH Product No.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

•

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,

Digital Flow Switch (Integrated display type)

80 mA) Response time 1 s (50 ms, 0.5 s, 2 s are selectable) Output protection Short circuit protection Output mode Hysteresis mode, window comparator mode, Accumulated output mode, Accumulated pulse output mode Hysteresis Variable Response time 1.5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Analogue output Output current: 4 to 20 mA Current output Max. load impedance

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.