Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Proposals for Energy Saving

(P .E.)

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

LX

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

•

114.5 5 1.8 ;t M~e'l 'Iii 1'B e . , G U4(~1~) 13.5 5 1.8 D I' F f .F ,Holl, (s. ) \16 Ii" 15.5 7 <.~ 48 , 5 6 8 10 ~"" ) .. ~ : 1~.p ' 7 2$ 30 ZPY25D 25 28 20 ... fl tS12 a~ ~ .

Modular F.R.L. Unit

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B B N.C.: Gray N.O.: Black B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Port size Model B C D A Q T N P L M K K J H G F E B AC10B AC20B AC25B AC30B

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Vacuum Unit

is N r Rated voltage (Supply valve/Release valve) C1 V None None Cannot be selected when t is P or T Symbol Voltage 5 24 VDC 6 12 VDC L None V V Cannot be selected when t is N L1 None None V L2 None V None Cannot be selected when t is P or T L3 None None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Pressure switch for vacuum/Pressure

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Series SV

port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type Rc G NPT NPTF Nil F N T P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause air leakage.

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-70 70 Sine Rodless Cylinder Direct Mount Type Series REBR Dimensions: 15, 25, 32 Operating direction B Operating direction A Operating direction A K W HB HB HC RE A B X REC Piping port P (Plug) Operating direction A Piping port P (Plug) Operating direction B N H CX HA Y T CB 8-MM thread depth M HT HP CY 4-counterbore B Counterbore depth C

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

Mechanical Valves Series NVM, NVFM, NVZNI

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

IIIIIII

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 2-P through 4-T counterbore M4 x 0.7 2.4 7 8.1 H + Stroke A' Auto switch M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A P A' Q QA B R C T D V E GA GB H J K L MM NN 6 10 16 20 25 32 M3 x 0.5 depth

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

MGP

L 4-MM depth ML CXT XX section Through 4-NN Through 4-OA socket head cap screw HA: T slot for hexagon 4-OB counter bore depth OL MX MXU MXS X 0.02 X 0.02 DA MXQ VB VA R U T X H PW MXF DB MXW XA depth XL H7 XA depth XL H7 MXP GA 2-P PB 2-P J K PA+stroke GB Q (Plug) MG FB C+stroke FA G S B+stroke A+stroke E MGP MGPM, MGPL Common Dimensions MGQ Standard stroke (mm) Bore (mm) B C DA FA FB G