3M/SMseries

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB)

Auto Switch Guide

Auto Switch Internal Circuit D-Z73 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply () Dimensions DC () Blue D-Z73 D-Z76

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Clean Air Module

in 24 variations Available in 24 variations Digital flow switch Regulator Regulator + Pressure outlet port ON/OFF valve Restrictor Filter Regulator + Filter Digital flow switch + Regulator + ON/OFF valve + Filter Regulator + ON/OFF valve + Restrictor + Filter LLB4 Flow range: 50 to 500 L/min (ANR) LLB3 Flow range: 5 to 100 L/min (ANR) Related Equipment Pressure gauge for clean room G46-4-01

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Series KV2 Fittings

22.23 17.46 17.46 22.23 23.81 22.23 22.23 22.23 23.80 25.40 10.0 10.0 12.5 12.5 12.5 17.4 17.4 17.4 17.4 21.0 21.0 21.0 21.0 25.2 27.0 30.7 27.5 31.2 33.3 30.8 34.5 36.6 40.6 31.4 35.4 36.4 40.8 42.9 10.8 13.5 10.6 13.3 15.2 11.3 15.0 15.5 18.9 9.9 13.8 14.8 18.8 18.3 16 16 17 17 17 21 21 21 21 22 22 22 22 24.6 1.6 1.6 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 8.5 9.8 17 26 17 26 45 32 33 51 55

Thermo-chiller/Rack Mount Type

Model Weight [kg]*1 Dimensions [mm] HRR010-A 43 Height 485 x Width 610 x Depth 820 HRR010-W 41 Selection HRR012-A HRR018-A 54 Warning Height 575 x Width 610 x Depth 820 HRR012-W HRR018-W 55 1. Model selection When selecting a thermo-chiller model, the amount of heat generation from the users equipment must be known.

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting)

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: L (Grommet Lead Wire 3m)

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: CN (w/o Connector)

Pressure Range: 0~0.97MPa, Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting)

Pressure Range: 0~1MPa, Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: CL (Plug Connector; Lead Wire 3.0m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting), Wiring Specification: L (Grommet; Lead Wire 3m)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output, w/o Analog Output, 200° Setting)

Piping Specification: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: L (Grommet Lead Wire 3m)