ZX

F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

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LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg

Air Cylinder

3 t CJ1 CJP CJ2 JCM y t CM2 CM3 CG1 CG1 20 to 32 CG3 Component Parts JMB No.

Sine Rodless Cylinder Series REBR Direct Mount Type

0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

VCC

r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

IDX-OM-Z004

L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 5 IDX-OM-Z004 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 6 IDX-OM-Z004 2 2 2.1 45 45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004

ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L3 L4 593 5 Port Solenoid Valve/Plug-in Unit 10-SQ2000 Kit (Terminal block box) T Directional Control Valves Air Grippers Modular F.

Type: Pressure Switch, Fluid Type: Air, Maximum Pressure Rating: 1MPa, Minimum Pressure Rating: 0kPa, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Output Method: Switch, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] Rc, Plumbing Thread Nominal: [1/4] 1/4, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating

Type: Pressure Switch, Fluid Type: Air, Maximum Pressure Rating: 1MPa, Minimum Pressure Rating: 0kPa, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Output Method: Switch, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/4] 1/4, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Humidity

3

VX2 24 VDC GDM2A-G-S5 100 VAC VXK 110 VAC 200 VAC VXD None 220 VAC GDM2A-R 230 VAC VXZ 240 VAC 24 VAC VXS VXS 48 VAC 24 VDC GDM2A-G-Z5 100 VAC GDM2A-R-L1 110 VAC GDM2A-R-L1 200 VAC GDM2A-R-L2 220 VAC GDM2A-R-L2 230 VAC GDM2A-R-L2 240 VAC GDM2A-R-L2 24 VAC GDM2A-R-L5 48 VAC GDM2A-R-L5 VXB VXE With light VXP VXR VXH VXF Gasket Part No. for DIN Connector VCW20-1-29-1-F VX3 VXA Bracket Assembly

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted Thread type Nil F N T Rc G Valve option Port size NPT Nil Standard For low wattage (2 W DC) 01 Rc (With sub-plate) Nil Without sub-plate 1 8 NPTF Y Option Light/Surge voltage suppressor Nil None S With surge voltage suppressor Z With light/surge voltage suppressor (Type D only) Since the indicator

VT307

Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm Type D: 6 to 8 mm Applicable crimp terminal Type E/T: 1.25-3, 1.25-3S 1.25Y-3N, 1.25Y-3S Round or Y shaped crimped terminals can be not used for type D.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Air Catch Sensor

entry (5m) Electrical entry (5m) Bracket 34 L2 34 L1 Bracket 34 (18) Deflection level indicator 10 10 Rc1/8 SUP.

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

AC Servo Motor Driver (MECHATROLINK-II type)

The length of the cable between stations (L1, L2 ... Ln) must be 0.5 m or more. 2. The total cable length must be L1 + L2 ... + Ln 50. 3. Please connect terminating connector with PLC. When multiple DRIVERs are connected by MECHATROLINK-II communications cable, a terminating connector must be installed at the final DRIVER. 19 - 3.

IDX-OM-U021

L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-

IDX-OM-M051

To the users machine L1 L2 L3 Terminal connecting screw: M5 Crimped terminal width: 9.5mm or less Applicable electric wire: 3.5mm2 or more Terminal block for signal Terminal block for power supply L1,L2,L3: Power supply PE: Ground 1,2: Operation 3,4: Error 5,6: Remote control 1 2 3 4 5 6 L1 L2 L3 PE To the users machine To the users machine Terminal connecting screw: M3 Crimped terminal