VT325

2 131 111 3 177 157 4 223 203 5 269 249 6 315 295 7 361 341 8 407 387 9 453 433 10 499 479 Formula: L1 = 46n + 39, L2 = 46n + 19 4-7-22

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Without connector) Note 1) Consult SMC for other voltages. 4.3-11 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max.20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

X X D3 D1 Y L1 M1 M1 Applicable tubing O.D.: 3.2, 4, 6 1/8", 5/32" 2 x Applicable tubing O.D. d Front view Right side view Metric Size Model Applicable tubing O.D. d D1 Release button D2 D3 D4 D5 L1 L2 L3 L41 L5 L6 L7 L8 M1 W1 W2 X1 X2 Weight [g] X(X) Y Max.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

48

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

SI unit for Ethernet POWERLINK

OFF Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing -15No.EX-OMV0023-A Switch setting The switches should only be set with the power supply turned off.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

VVX31/32/33

L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

VP4

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

® 3-Screen Display

RoHS 3-Screen Display High-Precision Digital Pressure Switch: For Air ISE70/71 Series How to Order ISE70 02 M L2 Pressure range Option 3 Symbol Description ISE70 0 to 1 MPa ISE71 0 to 1.6 MPa Symbol Description Nil Operation manual Y None K Operation manual + Calibration certicate Piping specification Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/41 T Calibration certicate Option 2 Symbol

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

SI unit for EtherNet/IP TM

Specification Seal cap EX9-AWTS For M12 connector socket: 10 pcs. -41No.EX-OMP0013-E Power supply connector (1) Cable with power supply connector Part number: EX500-AP0 1 0S Connector specifications S Straight A Angle Cable length (L) 1 1000 [mm] 5 5000 [mm] EX500-AP0#0-S EX500-AP0#0-A Item Specifications Pin No.

SI unit for DeviceNet ®

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.