Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available eit, Ethernet ITV Manifold Assembly, REGULATOR, ELECTROPNEUMATIC, 853, 2150 lb

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available eit, Ethernet ITV Manifold Assembly, REGULATOR, ELECTROPNEUMATIC, 853, 1500 lb

Series ITV electro-pneumatic and electronic vacuum regulators control air/vacuum pressure steplessly in proportion to an electric signal. They are light weight in design with a bright and easy to read LED display. The monitor output is available either as analog output or switch output. The ITV series is IP65 equivalent.Manifold for ITV1000/2000 Electro-Pneumatic Regulators, Up to 8 stations

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

Digital Flow Switch

unit: IP40] IP40 IP40 IP40 IP65 Dry air, N2, Ar, CO2 Fluid Air, N2 Air, N2 Dry air, N2 Dry air, N2 Dry air, N2 Setting Digital Digital Digital Digital Digital Digital Rated flow range 1 to 10 L/min 5 to 50 L/min 10 to 100 L/min 20 to 200 L/min 50 to 500 L/min 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 30 to 3000 L/min 60 to 6000 L/min 120 to 12000 L/min 0 to 0.5 L/min 0

3

1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 2 Flow Switch Variations/Basic Performance Table New New PFMV PFM PF2A PFMB PFMC Power supply voltage Rated flow range Setting Repeatability Hysteresis Output Display Fluid Enclosure Series IP40 IP65 IP65 IP40 IP40 Dry air, N2 Air, N2 Air

SMC Pneumatic Clean Series

room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2

0.4

L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 385.5 398 398 410.5 423 435.5 235.5 248 260.5 273 285.5 298 298 310.5 323 335.5 348 360.5 360.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

port One-touch fitting Applicable tubing O.D.: 10, 3/8" P , R port One-touch fitting + + + + Applicable tubing O.D.: 4, 5/32" 6, 1/4" n1 = Number of SY3000 n2 = Number of SY5000 A, B port One-touch fitting (Light/surge voltage suppressor) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (Station n) (Station 1) (Lead wire length) Approx. 300 L3 (Lead wire length) Approx. 300 17 18 16 x n2

2/3 Port Valve

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).