Vacuum Pad 2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter How to Order p. 3 Dimensions p. 3 M Vertical Vacuum Inlet, With Buffer How to Order p. 6 Dimensions p. 6 Construction p. 9 Parts Structure p. 10 Mounting Adapter Part Nos. p. 11 Buffer Assembly Part Nos. p. 12 1 Vacuum Pad 20, 25, 35, 50 Pad diameter How to Order ZP3P 20 PTSF Pad unit Pad diameter Symbol Pad diameter 20 20 25 25 35
w e r t No. q w e r t y Note Stud Case Ring Socket Dust cover Note Stud Case Ring Cap Dust cover Set screw MQQ M RHC MK(2) Basic Style: JB RS Q G JB12, 16 Center of sphere RS H A RZQ MI W S CEP1 CE1 R CE2 JB20 to 160 Center of sphere ML2B C J G5-S CV MVGQ CC RB R J (mm) DMaximum operating tension and compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.
P. 122 P. 123 P. 126 Female union Union elbow Union tee KGT Use to branch connection of tubes of both side 90 direction. KGF Use to pipe from male threaded portion such as pressure gage. KGL Use to connect tubes at right angle. P. 123 P. 125 P. 126 Straight union Plug-in elbow Different dia. tee KGT Use to branch connection of tubes with size down in both size 90 direction.
6 q o !8 i r t !4 @0 !7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.
G With light/surge voltage suppressor Manual override (Locking lever type) AV Pressure gauge mounting bore 1/8 AU Port size ON OFF OFF ON Indicator light B AF B H H N P A P A 37 37 AR Q Q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C C IR Pressure gauge mounting
(MPa) Operating pressure P (MPa) Data Graph (5) up to 500 mm/s Graph (8) up to 450 mm/s 160 700 80 80 140 600 10 120 500 Load weight m (kg) Load weight m (kg) 100 63 63 400 80 300 50 50 60 200 40 40 40 32 25 20 32 100 20 0 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P (MPa) Operating pressure P (MPa) Operating pressure P (
B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.
P Step motor (Servo/24 VDC) Note) DIN rail is not included. Order it separately.
B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.
Cap p. 17 Digital Input/Output Unit p. 7 tMarker p. 18 Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply
Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold
Description q Notes No.
M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234
Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.
Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA RE A B Both Ends Tapped (mm) Bore size (mm) O1 R O1 thread REC R R 32 M6 x 1.0 10 40 M6 x 1.0 10 CX 50 M8 x 1.25 14 CY MQQ M RHC H thread effective depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S
F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S K M E CEP1 S J L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5
Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold