VXA21/22

VX Manifold Series VVXA21/22 VNl Normally Closed (N.C.), Normally Open (N.O.) VQ Refer to p.4.1-64, 4.1-65 for specifications and models.

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

High Vacuum Angle Valve

Solenoid valve 22 XL Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 16.5 16.5 A B A B 22 20 (22) ( ): Dimension of the D-M9AV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Compact Cylinder Series NCQ8

250 (2-1/2") Single rod Double acting 1 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 050 (1/2"), 100 (1"), 200 (2") 062 (5/8"), 125 (1-1/4"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), Single acting 22 Note) Built-in magnet type has a minimum stroke of 025 (1/4").

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 V6 1.85 2.24 0.30 25 V7 3.68 4.28 5.68 0.60 -8- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Cables includid A-A (D type) Component parts No. Description Material Remarks No.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

How to Order Standard L 40 150 CM2Y L H7BW S 40 150 CDM2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

VDW

No. r Option Standard Sainless steel Body C37 q w e r t y u i u Tube assembly Stainless steel Coil assembly Stainless steel, PPS, FKM Armature assembly Stainless steel, PPS, NBR FKM O-ring (Body) NBR t Return spring Stainless steel Cover SPCE y Clip Stainless steel q 17-2-66 7 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve For Water and Air Dimensions VDW11 VDW21 22

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7F D-B5 D-B6 D-B59W D-H7C D-G59 D-K59 C-C73C D-C80C Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98 1.04 1.14 1.24 1.36 1.61 Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 6-14-24

Compact Type Dual-Rod Cylinder Series CXSJ

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40