Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

Title not found

16 Hex 13/64 13/64 5/16 Hex Typ. 80 M3-LB4 M3-LB1 M3-LB2 M3-LB3 M3F-LB3 M3-LB2 1/2 1" 15/16 5/8 5/8 5/8 5/16 Hex Typ. 3/16 Hex Typ. 81 M3-T1 M3-T2 M3-T3 M3-T4 M3-T2 1/2 See complete selection of adapters on pages 23 & 24 1/4 5 32 /32 3/16 Hex 7/16 Ref 1/4 Hex 5/16 Hex M3 x 0.5 M6 x 1 Thd .085 5 32 9 32 M3 0.5 Thd to 10-32 Thd .241 Ref 82 M3 x 0.5 to M6 x 1 (F) Adapter M3 Plain Plug M3

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

: MDHR3-10R 11221122MDHR3-10E port location 3 x M3 x 0.5 thread depth 6 P.C.D.24 A (Mounting thread) 17.5 20 120 120 40 2-3 B 8.5 25 Finger closing port M3 x 0.5 M3 x 0.5 25 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 Finger opening port 44 +0.02 2 x 3 0 depth 6 31 (A, B common view) 0 9h9-0.036 4 x M3 x 0.5 thread depth 6 2 x 4.2 (A, B common view) 9.7 4.7 1 19.5 10.1 5.8

Angle Seat Valve /

It is calculated using the following formula. r Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

ZSE30A(F)/ISE30A

x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip included Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included Panel mount adapter + Front protection cover Front protection cover Lead wire with connector Lead wire with connector Mounting screw (with 2

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

CEx-OMQ0011

(), Err9 -1.0 +1.0 WRITE 3P3 9 PRG STEP P3 9 " " " " 46 24 5 WRITE 4P4 PRG STEP P4 40 " " " " 25 32 40 50 63 80 100 DOWN UP ML22532 40 50~100 1 WRITE 5P5 <> 100 PRG STEP P5 " 0 " " " 0 10 20 30 40 50 UP DOWN 1 WRITE 47 6P6 1 WRITE 7P7 PRG STEP P6 0.0 )200.0 (P.57 13-2 0.009.99sec10ms 1 WRITE 8P8 PRG STEP P7 200 " " " " 0.009.99sec10ms 1 WRITE PRG STEP P8 200

IDUS/IDFS

/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric

Stainless Steel Heat

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

PF2D

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47

PF2D

(In case of PF2D504) (In case of PF2D520) (In case of PF2D540) Flow rate [L/min] 386 Digital Flow Switch PF2D Series For Deionized Water and Chemical Liquids Dimensions: Remote Type Monitor Unit PF2D30 -A Panel mounting type 0 1 40 41.8 4.3 40.3 SMC FLOW SWITCH 35.8 A 40 UNIT RESET SET 3 x 7.2 (=21.6) 8 x M3 6.4 1 2 3 4 19.4 Internal Circuits and Wiring Examples 5 6 7 8 -0 NPN (2 outputs

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

40 A B Insulation: Red (+) Manual override 2 x 3.2 (Mounting holes for manifold) 16.2 36 2 x 1/8" A (4), B (2) port (2 x 3.2 Mounting holes) (37) 44 (For E type) 0.3 mm2 (40.2) (36.7) 40 32.5 20.5 14.7 1.55 111.8 (1.2) (32.3) 109.1 L (11.7) (Lead wire length) 3 x 1/8" {P (1), EA (5), EB (3) port} 32.3 0.8 15 1.6 (20) EB P EA 32.5 10.5 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.