CG5-S

47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18 18 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | $*Or> Symbol 4 Port (Mahitold only 5 Port dI/Nlh J!'

ZQ

N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

MB1

D D D B B B Specifications and dimensions other than the above are the same as the standard type.

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

Compact Vacuum Ejector Series ZQ

N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

240

3 e u !

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Direct Solenoid

Fry] Dr EflStO S: D 6,41 ia3, (1221e4 i9 2.13 0021 5.16 (13r1 e4 (10) tfil 9,69 12161 2.43 tf4 3.t0 tE9 4.77 {rt2} (3t) 114 2.U t64 irnr.E in P!6inh.$3 NVS 4154 PABIA UsT c.nlr Ftu-ru.otro. !.r.or.r ar..r rtr-codrr. or .r.or ..d i.s (r.r.h.a {il.'!

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Air Fittings Fitting Series For Special Environment

O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3

NCRBIBwserbs

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

reduces flow setting time

3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.