3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Brake mechanism added

Applicable bore size Dd9 L1 L2 m d Drill through Included split pin Included flat washer Clevis Knuckle 2 x d Dd9 CDP-2A 40 10 0.040 0.076 46 38 4 3 3 x 18 L Polished round 10 L1 L2 m L1 L2 m CDP-3A 50 40, 50, 63 12 0.050 0.093 55.5 47.5 4 3 3 x 18 L Polished round 12 2 x d Dd9 CDP-4A 63 16 0.050 0.093 71 61 5 4 4 x 25 L Polished round 16 L1 L2 m CDP-5A 80 18 0.050 0.093 76.5 66.5 5 4

CE2

4 3 2 1 Counter value 10-12-55

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

REC

Use NA when design pivot bracket. 10-2-99 13 Series REC Construction !7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty.

Pin Clamp Cylinders

mm) Shim mounting position (Up to 3 mm) Guide pin fixing bolt () Guide pin fixing bolt () 100 + Shim thickness 100 + Shim thickness Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) MK MK2T 30 + Shim thickness 30 + Shim thickness CK1 CLK2 CLKG CKQ CLKQ CK CLK CK CLK 22 through CKQ Description Part no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Specifications None With SUP blocking plate With EXH blocking plate With SUP/EXH blocking plate Port plug (A port) Port plug (B port) Symbol Nil P R Type of actuation Symbol 1 2 3 Note) 2 position double 2 position double (latching) 3 position closed center 3 position exhaust center PR 4 Note) A B 5 Note) 3 position pressure center D side U side Stations Note) The 3 position type uses two

Information

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

•

ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

ZFC Series

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Table of Contents

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

This is a legacy product, and replaced byVHK2A-02S-02S, FINGER VALVE, VALVE, VHK2 FINGER VALVE, FA, VHK2/3 BODY PT 1/4, .13360 lb

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 02S (PT 1/4), A Side Port Size: 02S (PT 1/4), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

This is a legacy product, and replaced byVHK3A-02S-02S, FINGER VALVE, VALVE, VHK2 FINGER VALVE, FA, VHK2/3 BODY PT 1/4, .11735 lb