2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

C85

30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

HRX-OM-W002

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 To switch the offset mode, press the [ENT] key. "OFF" flashes, press the [], [] key, select "OFF", "MD1", "MD2", "MD3" and confirm with [ENT] key.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

MGG

depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1/8 20 47 M8 x 1.25 depth 16 238 44 11 38.3 12 (15) 25 52.5 53 121 (130) 123 75 94 164 25 Rc 1/4 58 M10 x 1.5 depth

CNA

27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 2035 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144

CNA

BP BQ C D E F GA GB GC GD GL GL1 GR H1 CLQ 40 50 63 80 100 M14 x 1.5 27 6 M8 x 1.25 14 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 25 to 500 M18 x 1.5 30 7 M8 x 1.25 18 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 MLGP M18 x 1.5 31 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 x 1.5 37 11 M12 x 1.75 22

IDG

8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

Air Fittings & Tubing

-32UNF 13.6 18.1 2.5 12 16.1 7 26 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 11.11 14.29 17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6 31.5 31.5 6 32.5 17.46 17.9 17 25.5 21 3 8 34 7 36.5 22.23 36.5 9 17.46 38.5 21.7 17 28 1 2 22 9.6 40 22.23 Reference dimensions after NPT thread installation.

CHKD/CHKG

5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x

Environment

20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

CM2

20 33.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 137 146 30 15 30 9 14 22 30 62 9 10 10 13 25 8 45 26 34.5 37.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 139 148 30 15 9 14 22 30 64 9 10 12 13 32 8 45 26 21 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1 to 300 22 8 177 188 39 11 18 24 38 88 10 15 14 16 40 11 50 32 With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 51 to 100 1 to 50 51 to 100

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Series IDG

4, 3/8 3/8, 1/2 1/2 330 352 369 428 370 392 409 468 450 472 489 548 3/8, 1/2 520 542 559 618 16 Air Dryer Series IDG Membrane Air Dryer Unit Units (M Type, V Type) How to Order F = (C x 1.8) + 32 1l/min = 0.0353SCFM IDG 30 M 03 Optional specifications Size Symbol Contents Size 3 3 5 10 20 30 50 60 75 100 5 Standard Nil 10 With fitting for purge air discharge 20 30 50 60 75 P Note 2)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

KJ

17 22.5 20.5 17.5 25 21.5 19.5 11.11 14.29 11.11 14.29 12.7 14.29 1 8 15.5 2.5 1 4 1 8 Applicable tubing 5 32 16 3 1 4 1 8 1 4 3 16 16 3.5 K 1 8 14.29 1 4 3 8 17 4.6 1 4 17.46 M Connection thread 1 8 15.5 20.5 14.29 1 4 3 8 5 16 18.5 6 H 13.5 17.46 30 16 19 1 4 17.46 22 28 D 3 8 1 2 3 8 21 7 14 22 22.23 30 33 22.5 24 28.5 30 MS 1 4 9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Series MSQ now includes smaller sizes 1, 2, 3 and 7 11-9-1 2 Compact rotary table