HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

CHKD/CHKG

3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are the same with or without auto switches.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15

MB1

C0.5 file chamfer R sphere 30 30 30 Symbol: A12 Symbol: A13 Symbol: A11 Symbol: A14 Symbol: A15 30 30 30 C0.5 R sphere R sphere Symbol: A19 Symbol: A16 Symbol: A18 Symbol: A17 Symbol: A20 30 30 30 30 30 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 Symbol: A25 30 30 30 Symbol: A29 Symbol: A28 Symbol: A26 Symbol: A30 Symbol: A27 30 30 30 30 30 20 Series MB1 Special port locations XC3

High Purity Fluoropolymer

Metric size Inch size Series Appearance Class None 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Panel mount union LQ2P 4 P.30 5 2 Union LQ2U 3 4 P.30 5 High Purity Fluoropolymer Fitting Insertion tool P.37 P.33 Series Tube O.D.

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1

Thermo-chiller/Rack Mount Type

3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AP AL AK AJ AI AH AG AB AA V U T S N M L K J I B A O P 63 60 12 14 180 158 250 228 25 25 108 192 30 72 100 66 180 135 117 65 228 200 Rc 1/4 M12 x 1.75 depth 23 75, 100, 125 150, 200, 250 300 80 70 16 14 200 178 284 262 27 30 128 224 35 89 115 76 214 160 138 75 262 230 Rc 3/8 M12 x 1.75 depth 28 100 80 16 16 226 200 326 300 30 32 143 262 40 110 125 80 245 190

Modular F.R.L. Unit

8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282

HRX-OM-X071

cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-10 3.3.4

JXCx-OMU0004

5mm/s LEHF10 LEHF20 LEHF32 LEHF40 3 11 48 72 5 19.5 84 126 [N] 7 28 120 180 * LEHF10 30%F.S.LEHF20 25%F.S.LEHF3240 20%F.S.

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

SMC

10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5

CM2

SCM220A, #3, #19 CM2L25SCM225A, #3 SCM225A, #3, #19 CM2L32SCM232A, #3 SCM232A, #3, #19 CM2L40SCM240A, #3 SCM240A, #3, #19 The data shows auto switch equipped styles.

KR

(mm) Connection thread R Model A M FR double layer L FR soft nylon KRH06-02S KRH06-01S 1 8 16 12 18.5 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A LVH LQ2R4C-M LQ2R4B-M LQ2R4A-M LQ2R3D-M LQ2R3C-M LQ2R3B-M LQ2R3A-M LQ2R2F-M LQ2R2E-M LQ2R2D-M LQ2R2C-M LQ2R2B-M LQ2R2A-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 LVD 4 19 18 12 6 19.9 34.5 22 LVQ 1/4" 16.5 LQ 43 23.5 1/4" 42.5 43 LVN 5 24 18 9 26.2 22 29.5 23 3/8" 42.5 52 51 52 51 59.5 58.5 59.5 58.5 TI/ TIL 30 3/8" PA 6 30

CNG

4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68 84 16.5 10 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 182 (190) H e f h ZZ 30 19 55 202 (210) 35 Stroke x 197.5 (205.5) 30 20 62 219.5 (227.5) 40 200.5 (208.5) 35 20 62 222.5 (230.5) 40 226 (235) 35 20 70 246 (255) 50 Note) Dimensions inside ( ) are for long

Modular Type Lubricators Series AL

Size 20 30, 40 Description Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 Description None Mounting Bracket Float Auto Drain (N.C.)