Slider Type Ball Screw Drive/11-LEFS Series

24 66 6.5 M4 x 0.7 thread depth 8 (F.G. terminal) 6 13.9 Vacuum port Rc1/8 +0.025 0 3H9 ( ) depth 3 n x 4.5 4 48 120 F B D x 120 (= E) 10 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.

HRX-OM-Q026

PV SV 48. Select operation of the contact output signal 1 with [] key or [] key, and press [SEL] key to enter.

CLQ

52 42 46 62 66 9.2 10.7 45.2 49.2 20 25 L1 Rod end nut Front flange type: CLQF/CDLQF FV S Front flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A + Stroke L G B + Stroke 8 2-6.6 FZ FX B 71 78.5 19.5 22.5 61 68.5 A A B 29.5 32.5 5 to 50 5 to 50 20 25 Bore size (mm) FV G FX FZ L L1 S L1 Rod end nut 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 20 25

CXS

size (mm) Bore size (mm) 0.1 0.15 0.2 0.3 0.4 0.5 0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48

CY1

42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 171 60 48 70 47 10 60 121 188 94 32 With auto switch CY1R6H .

MK

13.5 0.15 7.5 20 36 46.8 36 48 24.5 75.5 62.5 31 4 MK2B25 16 8 23 40 52 53.8 40 27.5 78.5 65.5 32 5 Note 1) Above figure is for D-A73, A80 Note 2) Dimensions E and F are 7mm longer for the auto switches with connector (D-A7lC, A80C, J79C).

VQ4000

Nil W 2-5-5 Base Mounted 6 Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Courtesy of Steven Engineering

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5

Compact Cylinder with Lock Series CLQ

52 42 46 62 66 9.2 10.7 45.2 49.2 20 25 L1 Rod end nut Front flange type: CLQF/CDLQF FV S Front flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A + Stroke L G B + Stroke 8 2-6.6 FZ FX B 71 78.5 19.5 22.5 61 68.5 A A B 29.5 32.5 5 to 50 5 to 50 20 25 Bore size (mm) FV G FX FZ L L1 S L1 Rod end nut 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 20 25

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

PSE530/200

When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely. To connect the connector to the multi-channel pressure sensor, push the connector with its A portion facing toward you into the socket until it clicks as shown below.

3 Port Air Operated Valve Series SYJA300

override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48

PSE200

When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely. To connect the connector to the multi-channel pressure sensor, push the connector with its A portion facing toward you into the socket until it clicks as shown below.

VXR21/22/23

48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

VQ4000

W Dust proof Dust tight, Jet proof V V 1.11-5 Series VQ4000 Plug-in Conduit terminal 0 1 2 position single: VQ410 l 23.5 23.5 50 158 50 90 108 158 Indicator light 11 (A port) 11 (B port) (12.5) 5 3 (12.5) 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 25.6 Mounting hole 14 5 1 3 12 30 45 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) Manual override Bottom piping SMC (A, B port

Clean Regulator/Fluororesin Type

) 23 32 SRF10 1/4" A1 A2 B1 B2 Model SRF10S-1S07 SRF10S-1S0711 SRF10S-1S11 SRF10S-1S1107 SRF10S-2S07 SRF10S-2S0711 SRF10S-2S11 SRF10S-2S1107 31 48 31 48 OUT IN 28 51 54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator

Table of Contents

Refer to Made to Order Specifications on page 14-19-48. Note 2) Specifications with micro mist separator is also available. Refer to Made to Order Specifications on page 14-19-50. Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Reed switch LED OUT () Blue OUT (+) Brown Resistor Zener diode D-A54 Weight Zener diode Choke coil (g) Resistor OUT () Blue OUT (+) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model Reed switch LED 24 24 24 0.5 Lead wire length (m) Surge absorber 48 48 48 3 96 5 D-A56 Dimensions DC (+) Brown LED (+) Resistor Load Reed switch OUT Black Reverse current prevention diode DC power supply () DC

MVGQ

, 110, 220, 240 AC50/60 Hz RS H A Coil rated voltage (V) 24, 6, 12, 48, 100, 110 DC RZQ Allowable voltage 15% to 10% of the rated voltage 5.6 VA (50 Hz), 5.0 VA (60 Hz) Inrush Apparent power AC (2) MI W S 3.4 VA (50 Hz), 2.3 VA (60 Hz) Holding Made to Order Specifications (For details, refer to page 10-21-1.)

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no