CY1

25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Solenoid Valve Rubber Seal Series SY100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT 100 million cycles or more (By SMC life test data) VP VG VP S070 VQ VKF VQZ Available in vacuum applications VZ (Up to 100 kPa) VS Copper-free VFN No copper used for sections in contact with fluids.

VP300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 standard 7 1 2 In the case of external pilot type of body ported type, A is only available.

Pressure Gauge Guide

(Black) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com The arrow in the diagram indicates the direction of the pressure increase.



.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Manifold capable Rich line-up AMR VVEXB/Rc 1/8Up to 10 stations VVEX2/Rc 1/4Up to 8 stations Port sizes available from M5 to Rc 2, most flow rates and pipes can be accommodated.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data With One-touch fittings are newly introduced.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Type Without buffer With buffer Page ZQ Mounting Vacuum entry port Mounting Vacuum entry port ZF Male thread Female thread Series ZPT ZP Buffer body (Male thread) 13-11-72 to 13-11-76 Vertical vacuum entry Female thread ZCU Female thread Common

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

CQM

4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Guide Table Series MGF ø40, ø63, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMounting height -X Reduction by 15 to 20% (Compared to SMC Series MGQ) 20Data Guide table Series MGF 40, 63, 100 Built-in non-rotating mechanism Internal guide pin prevents rotation.

MLGC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 9-15-1.

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(800) 526-7661

MHL2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc. D2012-4-1 2 Parallel Style Wide Opening Air Gripper Series MHL2 Size: 10, 16, 20, 25, 32, 40 How to Order D 16 MHL 2 1 Y7BW S Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

VP4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 position single 1 2 3 4 3 position exhaust center 2 position double VZS 3 position closed center VFS Electrical entry Body style G Grommet VS4 1 1 4 Standard 3 4 Standard 5 7 TL D T Conduit terminal DIN terminal VQ7 Conduit terminal with indicator

PSE550/300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1% F.S. 1% F.S.

VCA

Manifold body e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w e r Part no.

Vacuum Equipment

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com For the vacuum release valve, select a 2-3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to Minimum Stroke for Auto Switch Mounting on page 54.

IDUS/IDFS

Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Select a model having an air flow capacity that is higher than the corrected air flow.