Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.

180

20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2

Compact

200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!

LX Series Compact Electric Actuators

200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!

CLA

Stop Accuracy (Variation in control system is not included) (mm) Piston Speed (mm/sec) Type of locking SO 100 300 500 I 2 .0 Spring lock O .4 O .S 1.0 Air pressure lock Spring-Air pressure lock O .2 O .3 O .S 1.S Condition/load: 25% of thrust at Skgf/cm2 Solenoid valve: Mount on lock-port Max. piston speed: 500mm/sec If the application is within the allowable kinetic energy specified, the

REC

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Pin Clamp Cylinders

Bore size 32 Equiv. 32 piston area S 1 pc. (Unclamping side) Guide pin diameter * For guide pin diameter, refer to Table 1 on the next page. Guide pin shape Auto switch Round type Diamond type Nil Without auto switch * For applicable auto switches, refer to the table below.

CC

QL QB P NL 100 200 300 400 500 800 700 600 50 9.5 11 0 30 86 3 28 62.5 CC63-lSl1-lG 228.5 278.5 378.5 503.5 603.5 728.5 CC63-lSl1-lG s s s 7 13 2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46 185 0 29 120 * Hexagon socket head cap screw is used for mounting

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

MRQ

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient

2/3 Port Valve

(No need to add options "S" and "L".)

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

3 Position Cylinder Series RZQ

If reapplication of grease is needed, apply grease specifically provided for this purpose: Maximum speed (mm/s) Grease: Product name: Grease pack Part No.: 10 g GR-L-010 150 g GR-L-150 2. Use the cylinder in applications in which the overrun will not cause any problem. 2. When dynamic seals are replaced, use a seal kit provided for each bore size.

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

, 175, 200 Ball bushing bearing MGTL 100 8-24-2 3 Cylinder with Turntable Series MGT 63, 80 100 How to Order MX MTS M 63 50 11 Y59A S S A93 MGT MY Table unit/ Number of auto switches CY Table unit/ Auto switch S 1 pc.

Compact Electric Actuator Series LG1

Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.

VQZ1000/2000/3000

Cylinder side pressure (P2) VQC Specifications M S C M S C Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SQ I N I N SUP side pressure (P1) T U O T U O VQ0 To CYL port Dimensions VQ4 Single unit Manifold 21.5 (5) VQ5 18 29 10.5 2n-C4, C6 C4: One-touch fitting

VM

(mm) Model Bracket mounting dimensions Weight (g) S Bracket assembly no.