Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, CONNECTOR CABLE, DEVICENET, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, M12 INTERCONNECT CABLE, 0.5M, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, WATERPROOF CAP M12 FOR PLUG, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, WATERPROOF CAP M8 SOCKET, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, EXTENSION INPUT BLOCK *LQA, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, M12 INTERCONNECT CABLE, 5.0M, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, SERIAL UNIT, NPN, DEVICENET, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, TERMINATION PLUG, VALVE, EX500 SERIAL INTERFACE UNIT, 21, EX500 NO SIZE

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, EXTENSION INPUT BLOCK, M8, PNP, VALVE, EX500 SERIAL INTERFACE UNIT, 22

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, INPUT BLOCK *LQA, VALVE, EX300 SERIAL INTERFACE UNIT, 22, EX300, 0.13565

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, 0/16 IO SI UNIT *LQA, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches; Valve & input unit manifolds can be connected around the GW unit; Compatible with 64-digital-outputs & 64-digital-inputs; GW unit, input unit manifold: IP65; Valve manifold including SI unit: IP67

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67 EX500 SERIAL INTERFACE UNIT. SERIAL UNIT, PNP, DEVICENET. VALVE.

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, POWER CONNECTOR CABLE, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, POWER CONNECTOR CABLE, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, WATERPROOF CAP M12 SOCKET 10PK, VALVE, EX500 SERIAL INTERFACE UNIT, 22

V

F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly Stations (n) 2 3 4 5 6 7 8 9 10 L1 53 69 85 101 117 133 149 165 181 L2 40 56 72 88 104 120 136 152 168 L3 16 32 48 64

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

seal 2.0 (0.11) VQZ1320 20 or less 26 or less Closed center VQZ1000 61 Rubber seal 3.1 (0.17) VQZ1321 25 or less 33 or less VFS Metal seal 2.7 (0.15) VQZ1420 3 position 20 or less 26 or less Exhaust center Rubber seal 5.4 (0.3) VQZ1421 25 or less 33 or less VS Pressure center Rubber seal 3.1 (0.17) VQZ1521 25 or less 33 or less Metal seal 8.1 (0.45) VQZ2120 14 or less 18 or less VS7 Single 64

ZX

ZSE2-0X-15C, ZX1-VAK15LZ 13-2-64 64 Vacuum Module: Vacuum Pump System Series ZX How to order (3) Adsorption confirmation switch unit (For replacement) Phillips screw Manifold How to order (6) Digital vacuum switch unit (For replacement) M2.5 x 51 How to order (5) Vacuum switch unit (For replacement) Phillips screw M2.5 x 51 Phillips screw (M2.5 x 39 ) Filter unit (For replacement) ZX Phillips

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, M12 INTERCONNECT CABLE, 3.0M, VALVE, EX500 SERIAL INTERFACE UNIT, 22,