3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

time*1 1.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000, 5000 ms) Hysteresis Hysteresis mode Variable from 0*2 Window comparator mode Short circuit protection Yes Voltage output Output type Voltage output: 1 to 5 V Voltage output: 0.6 to 5 V Voltage output: 0.8 to 5 V Output impedance Approx. 1 k Output type Current output: 4 to 20 mA Current output: 2.4 to 20 mA Current

Wireless System

Description 2 1 24 V (for control/input) 1 24 V (for output) 2 24 V (for output) 2 0 V (for output) 3 0 V (for control/input) 3 24 V (for control/input) 4 0 V (for output) 4 0 V (for control/input) 3 (86.6) 4 1 73.6 56.6 Power supply connector PWR OUT: M12 5-pin socket, A-coded Configuration EX600-ED4 (Pin arrangement 1) EX600-ED5 (Pin arrangement 2) Pin no. Description Pin no.

Thermo-chiller

stopper) 20.0 [508] Power cable entry (Hole 1.6 [40]) (Grommet with membrane) HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Handle Eye bolt M12 (4 places) 28.1 [715] Operation display panel 27.0 [687] Facility water outlet Rc3/4 Overflow port Rc1 Handle Facility water inlet Rc3/4 Ventilation air outlet Circulating fluid outlet 48.6 [1235] Fluid level

Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Yes Yes Grommet Relay, PLC 12 V 100 V 24 V IC circuit 5 V, 12 V Solid state switch Relay PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V For 25, 32, 40, 50, 63 Lead wire length (m) Load voltage Electrical entry Auto switch model Pre-wire connector Applicable load Perpendicular (1) In-line Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z

VS 8-2/VS 8-4

If miswired, there is a danger of malfunction or damage to the reduced wiring system. 4. Do not wire while energizing the product. There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4.

RSQ

3-wire (NPN) 3-wire (PNP) J 5 V, 12 V IC circuit Grommet 2-wire 12 V DConnector 3-wire (NPN) 3-wire (PNP) Relay, PLC 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V -X Grommet Water resistant (2-color indication) 12 V 2-wire 20H7BA 4-wire (NPN) With diagnostic output (2-color indication) H7NF IC circuit 5 V, 12 V Data Solid state switches marked with are produced

Table of Contents

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] 4(A) (B)2 2(B) (A)4 Apparent power (VA) AC 5(R1) (R2)3 1 (P) (R1)5 1 (P) 3(R2) Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) 3 position exhaust center 3 position exhaust center Surge voltage suppressor Indicator light 4(A) (B)2 2(B) (A)4 Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

High Vacuum Angle Valve, XL Series

G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16

PF2A/PF2W

Internal voltage drop: 1 V or less (With load current of 80 mA) PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (With load current of 80 mA) Switch output Note 4) Output specifications NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulse Pulse width: 50 msec Accumulated Note 4) pulse output Output voltage: 1 to 5 V; Load impedance:

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

Vacuum Pad

With adapter ZP3P 20 PT T SF A5 Pad diameter Symbol Pad diameter 20 20 25 25 35 35 50 50 Mounting thread size Symbol Mounting 20 25 35 50 Thread size A5 M5 x 0.8 V V A12 M12 x 1.75 V V AG1 G1/8 V V AG2 G1/4 V V AG3 G3/8 V V Male thread Pad material Symbol Material B5 M5 x 0.8 V V B8 M8 x 1.25 V V Female thread SF Silicone rubber Complies with the FDA (USA Food and Drug Administration

1.63

27 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 13 15 20 20 22 22 5.4 5.4 6.7 6.7 8.6 8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1/8 G1/8 G1/8 G1/8 G1/4 G1/4 512 Compact Guide Cylinder/Wide Type MGPW Series 20 to 63/MGPWL, MGPWA Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB T R U H X V PW MGJ 2 x

MNB

100 to 750 40 41 16 1/4 25 26 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) 34 205 32 88.5 18.3 M6 x 1.0 4 6 27 154 6.5 4 M10 x 1.25 1/8 37 47 13 6.5 39.5 216 40 96.5 19.5 M6 x 1.0 4 6 27 161 8 4 M14 x 1.5 1/4 41.5 51 16.5 9 47 245 50 111.2 22.4 M8 x 1.25 5 7 31.5 183 9 5 M18 x 1.5 1/4 47.5 58 20 10.5 55.5 259 63 123.5 20.7 M8 x 1.25 5 7 31.5 197

IDG

B) 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 0.83 (0.90) 1.21 (1.30) 1.44 (1.53) 2.23 (2.33) 2.26 (2.36) 2.55 (2.65) 3.10 (3.20) 3.15 (3.25) Type M Weight (kg) (With auto-drain) 1.28 (1.35) 1.67 (1.76) 1.90 (1.99) 3.34 (3.45) 3.37 (3.48) 3.74 (3.84) 4.29 (4.39) 4.34 (4.44) Type V Note 1) For flow characteristics and pressure characteristics of regulator, refer to page 14-4-37.

AC

03 04 06 10 M5 X 0.8 AC2000 to AC4000 AC2010 to AC4010 AC2020 to AC4020 AC2030 to AC4030 AC2040 to AC4040 AF + AR + AL + V Residual pressure exhaust 3 port valve 1/8 1/4 3/8 1/2 3/4 AW + AL + V V AF + AR + V AF + AFM + AR + V AW + AFM + V Note 1) If indicating more than one symbol, place the desired symbols in alphabetical order.

Electric Actuators

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L