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fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ? Series VQC1 000 : Base-Mou nted Type/Pl u g-in Un it Q How to order manifolds refl e I I Kit Kit Bequires ror S kit SDO,'. Fill out for UO serial kit only.

SYJ300-OMU0003

)3 Assy SYJ5000-13-3A 4 5 Assy CE -Q 6 SUS 3 SYJ500 SYJ5000 SYJ500 SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

EX500-GPR1A.eng

Address setting switches 1, 2 and 3 ( SW1, SW2 and SW3 ) OFF N.C ON OFF ON With bus terminator Without bus terminator Without bus terminator OFF OFF ON OFF OFF ON OFF OFF ON SW3 1 1 2 100 10 SW3 SW2 0 1 2 9 8 7 6 SW2 3 4 5 0 1 2 0...9 SW1 0...9 9 8 7 6 SW1 3 4 5 0 1 2 1 Common to EX500-S 01/EX500-Q 20 21 Note1: For wiring method, refer to subsection "Wiring" ( page 10 ) of section "EX500"

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20 ML2B 22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 C J G5-S 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 CV (mm) Boss-cut ZZ Bore size (mm) MVGQ 20 25 32 40 103 107 CC 109 138 RB J D-X 20Data

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the

CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f g h LW M P Q R X1 Y1 Z ZZ SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 44.5 43 1/8 16.5 6 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 50.5 49 1/8 17 8 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 64.5 63 1/4 19.5 10 11 16 8 67 83 22 25 M16 x 1.5 7 14 44 111 71 1/4 20.5 10 20 10 75 95 72.5 13 27 30 M20 x

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Cylinder

1ode ' , AI fll I j>~[IH'~ I'L l 1-, MM UI INX Al l A, Model JIlor. siz;'4!!1! "041 8 , NO';'o I,LI L, " MM U, I i:/X I f!> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o !

MVGQ

Refer to Fig. (6) (for the meter-out mode). RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6) The speed controller that is located on the side of the selector plates () direction controls the speed.