Pulse Valve

1 u y t r e w q i r e IN w IN q t y u i o !0 u y t o i !0 Component Parts Component Parts No. Description Material 1 Body ADC 2 Main valve Resin 3 O-ring NBR 4 Bonnet ADC 5 Seal NBR 6 Washer Fe (Chromated) 7 Compression nut ADC 8 Hexagon bolt Stainless steel No. Description Material No.

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Title not found

available Non.rclaling rcd Sngle f0( (N)C@K 1 2 . 1 6 24,25 3 2 , 4 A 5 0 , 6 3 Also Available: E 12,16 2A 25 32,40 Double rod iN)c0r(u'/ a 1 2 , 1 6 20,25 32,.1O CQP2 80,100 Spr ng _ _ elurn 3/extend ; coP2 1 2 , 1 6 24,25 32,44 50 Serbs End o20 to MechanicallY the cylinder at end of Large bore size Single rod 14n 160 180 200 124 Double r c d c02w 160 200 Long stroke 32 40 50,63 a0,100

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x

SYJ300-OMU0003

SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3

EX500-GPR1A.eng

Address setting switches 1, 2 and 3 ( SW1, SW2 and SW3 ) OFF N.C ON OFF ON With bus terminator Without bus terminator Without bus terminator OFF OFF ON OFF OFF ON OFF OFF ON SW3 1 1 2 100 10 SW3 SW2 0 1 2 9 8 7 6 SW2 3 4 5 0 1 2 0...9 SW1 0...9 9 8 7 6 SW1 3 4 5 0 1 2 1 Common to EX500-S 01/EX500-Q 20 21 Note1: For wiring method, refer to subsection "Wiring" ( page 10 ) of section "EX500"

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

CHKD/CHKG

1 q y !3 o i !4 !2 u t e w CHQ CHK CHK CHN CHM CHS CH2 32 to 100 20 to 25 CHA Related Products DWithout auto switch Parts List Replacement Parts/Seal Kit Content Description No.

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

ARM10/11

Regulator block stations 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations IN OUT OUT IN 5 stations 6 stations 4.

ARM10/11

Regulator block stations 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations IN OUT OUT IN 5 stations 6 stations 4.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

MVGQ

Refer to Fig. (6) (for the meter-out mode). RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6) The speed controller that is located on the side of the selector plates () direction controls the speed.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456