Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Compact Cylinder Series NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Contents MXPJ6-PS 6 2 pieces of no. !2 and !3 8-8-12 12 Precision Air Slide Table Series MXP MXP10/12/16 q i o w e !1 !9 u !0 !4 !3 !5 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !8 !7 !6 y r t !

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Soft Start-up Valve AV2000/3000/4000/5000 1

16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,

Fieldbus system IO-Link Master Unit

Signal name Details 1 L+ 24 V (Control and input) 2 I/Q Digital input (PNP) 3 L0 V (Control and input) 4 C/Q IO-Link communication, Digital input (PNP) or Digital output (PNP) 1 5 N.C. Not used 1: Can be changed with parameters. Digital output power supply is used for control / input. (2) EX600-LBB1 M12 5-pin Socket Configuration Pin No.

Multi-Axis Step Motor Controller

1 !2 w e !3 !4 r t y u i !5 !6 No.

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Gun Type Ionizer

(Refer to Table 1.) Table 1 Model Applicable tubing O.D.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Compact Cylinder

After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/4 turn for a port size of M3 x 0.5 or 1/6 turn for a port size of M5 x 0.8. For elbow type fittings, tighten an additional 1/2 turn for a port size of M3 x 0.5 or 1/3 turn for a port size of M5 x 0.8 if gaskets are mounted in two places.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

VDW

VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5 thread depth 5 1 (IN) port Dimensions inside ( ) are for port size 1/8. 2 (N.C.) port LVH LVD LVQ 2-M4 x 0.7 Thread depth 6 LQ LVN Bracket assembly part no.

Vacuum Pad

across flats 19 5 5 50 5 5 50 B A 6 B A M14 x 1 M14 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 6 4 4 M8 x 1.25 M8 x 1.25 K: Non-rotating D-D J: Rotating D-D Dimensions Dimensions Part no.