LEC-OM07605CN

W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

53

Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRSH090-W-l HRS-EP023 G thread conversion fitting set Part no.

MXW

Load factor an Va Item Note CX W Examine W.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Series VQ100 1

(42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA)

MXQ

6 r u y w !

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

MY2

) 7.1(MAX 18.6) 10 (MAX 26) T 6 7 12 S 40.8 46.7 67.3 h 4 5 6 FA 38.5 56.4 67.8 EY 27 36 56.5 EC 6 9 13.5 E 14.4 17.5 25 EA 7 8.5 13 W 16.5 25.8 38 High load shock absorber MY2C Bore size Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 Shock absorber model RB1412 RB2015 FA 56.4 67.8 h 6 6 W 25.8

Air Slide Table Series MXQ

Can be used based on n = + + '+ + ' = 0.25 + 0.022 + 0.011 + 0.17 + 0.24 = 0.693 1 n = + + + n 1 7 Air Slide Table Series MXQ Load weight: W (kg) Overhang: Ln (mm), Corrected value of moment center position distance: An (mm) Work piece mounting coefficient: K Fig. 3 Fig. 1 Fig. 2 Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L

Vacuum

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

VT307

Power consumption/DC 2 W, 2.2 W (With indicator light) 1. Since this valve has slight air leakage, it can not be used for vacuum holding (including positive pressure holding) in the pressure container. Specifications different from standard are as follows. 25 ms or less (at 0.5 MPa) Response time (1) 100 VDC: 2.4 W Note 1) Refer to Response time of standard specifications.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Nil W Note 2) CD1 CD2 SD CU1 CU2 SU Note 1) D sub connector is not included.

MK

D-M9V D-F9WV Hs Hs D-F9BAL Hs Hs D-A9 D-A9V D-M9, D-F9W D-M9V, D-F9WV Auto switch model W 19.5 21.5 B 4.5 4 A 11.5 12 W 5.5 6 B 4.5 4 A 11.5 12 Hs 17 19 B 0 0 A 7.5 8 W 1.5 (4) 2 (4.5) B 0 0 A 7.5 8 Symbol Bore size (mm) 12 16 D-F9BAL Auto switch model W 14.5 15 Hs 17 19 A 10.5 11 B 3.5 3 Symbol Bore size (mm) 12 16 ( ): Denotes the values of D-A93. 10-7-12 13 Rotary Clamp Cylinder:

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.