4-channel Flow Monitor ( compatible)

Accumulated flow value hold setting 50 F80 Power saving mode 51 F81 Security code 52 F90 Setting of all functions 54 F95 Channel to channel copy function setting 56 F96 Sensor input display 57 F98 Output check 58 F99 Reset to default settings 65 Other Settings 66 IO-Link specifications 70 Outline of IO-Link function 70 Communication specifications 70 Process data 71 IO-Link parameter setting 75

Lubrication Equipment

AMR AWM How to Order AWD AL 23 80 12 0 R ITV AL800 Optional specification Flow direction: Right to left R VBA AL900 Lubricator Body size Port size Options VE 1 1S-1 1S-2 2 3 6 8 . When specifying more than one option, please list alphabetically.

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

Dedicated Controller Series LC1 Uniaxial Type

20P) Indicator light CN1 control terminal (Halfpitch 26P) 17 23 23 35.5 19 CN4 42.5 120 SMC LINIAR ACTUATOR CONSTRUCTION SYSTEM 90 CN5 CONTROLLER CN6 38 Interface cover 12.5 12.5 80 29 CN3 connector (D-sub 9P) 75 Mounting bracket 244 24 196 24 55 Series LC1 Series LC1/Operating Part Names Encoder/Limit switch signal connector: CN4 Control terminal: CN1 General-purpose input/output: CN2

Stopper Cylinder

. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the attached flat washers when mounting 12

ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

Guide Table Series MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

End Lock Cylinder Series CBJ2

pin (5d9-0.060) Piping port 2-M5 x 0.8 27.5 -0.030 20.3 14.5 23 M5 x 0.8 20 20 6 21 18.3 +0.2 +0.1 6.5 15 0 -0.3 18.3 55.5 + Stroke 10 28 93.5 + Stroke 8 101.5 + Stroke 6

Digital Flow Switches Series PF2A

PF2A5--2 (With voltage output type) PF2A511, 521, 551 B Wiring 116 23 1.6 76.2 Brown (1) DC(+) Main circuit Black (4) OUT (Output for display unit) White (2) NC/Analog output 54 44 34 Blue (3) DC() Use this sensor by connecting it to a P/A remote type display unit Series PF2A2/3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (44.2) A 4 3 (mm) A B Output specification Pin no.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Refer to page 23 for details. Note 4) For low vacuum specifications, the operating pressure range is 1Torr (1.33 x 10Pa) to 1.0MPa. Consult P/A if used below 1Torr (1.33 x 10Pa). 14 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW200/300 Construction VDW250 VDW350 Parts list Description Material No.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

Cylinder

.:0 .r -6 I 6 3 47.5 52.5 57.5 62.5 16.5 10.5 20 10 3 I SO.5 55.5 ' 2IP I tao , . 1 ' 60.5 IJ 35.5 ..75 5 4 154.5 59.5 64.5169.5 79.5 24.51 '5.5 23 i_ 15 R ' . s I I ~Bore size S' ! D A A' S . (mm) F F' GA I GS H J 5 ,~t' , 10st I 1&$\ 49'S\ ;p~" K I MM NN 8 I M3XO .5 MlOX 1.0 7 30.5 35.5 40.5 45.5 6 7 9 14 ,4 3 8 6.5 6 6 17 6 I 8 ;lOS 35.5 40.5 4!

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

CRQ2

The figure shows the view from the long shaft end. 11-8-23 24 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease -X6: Shaft, Parallel Key Made of Stainless Steel Spec.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23