SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Clean Gas Filter

Construction q t e r w IN Description No.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

Series 12-REA Sine rodless cylinder

L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Description Meterial Note q Body Alminum die cast Metal seal Spool/Sleeve Stainless steel w Rubber seal Spool valve Aluminum/NBR r e Piston Resin Pilot valve 1.12-36 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 2 position single Grommet(G): VQZ115 (R)lGl01 0 1 300 68.5 2-3.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 R3 3 2 4 SY 10 22 SMC B A 5 1 3 SYJ Cover diameter 1.6 Cross

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

A

www.stevenengineering.com I 5.15 AIR PREPARATION MODULAR TYPE ACCESSORIES SPACER H O W T O O R D E R S PA C E R D I M E N S I O N S S PA C E R Y10 (1000 S E R I E S) Y20 (2000 S E R I E S) Y30 (3000 S E R I E S) Y40 (4000 S E R I E S) Y50 (4000-06 S E R I E S) Y60 (5/6000 S E R I E S) Model A Applicable Model Y10 8 NAC100~NAC1040 Y20 10 NAC2000~NAC2040 Y30 11 NAC2500~NAC2540 NAC3000~NAC3040

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Table of Contents

suppressor (Non-polar type) Vacuum switch None With vacuum switch Nil E Silencer Types R and U are DC only.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

•

R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb. F:M5.X O.8 I F:M6 x 1 D E t3 I D." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n

Table of Contents

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n

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, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !