IZx-OMT0049 Non-standard bar length Separate cable No. of drop prevention cover needed Symbol No. of drop prevention cover needed Symbol for bar for bar IZS40-E3 IZS40-E4 IZS40-E5 IZS40-E3 IZS40-E4 IZS40-E5 length length 28 1 154 5 52 1 1 166 1 1 4 70 2 1 172 1 5 76 1 1 1 178 1 5 88 1 2 184 6 94 3 196 1 1 5 100 2 2 202 1 6 106 1 1 2 208 1 6 118 1 3 214 7 124 4 220 2 6 136 1 1 3 226 1 1 6 142 1 4 238
Dimensions: ZR1-FX Circuit diagram Suction filter 1 1 1 1 1 1 (Mounting hole) Suction filter M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.
+ 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332 MY340 MY350 MY363 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 1 1 1 1 1 1 1 1 1 1 1 72 90 100 38 50 55 60 32 36 40 20 21 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 6.5 6.5 9 4.5 4 5.5 5.5 10 10 12 12 16 16 19 6 6.5 9.5 9.5 11 11 14 Applicable
1 !1 y u i Component Parts Description Material Description Material No. No.
Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to
2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!
Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 4 6 4 6 1/4 1/4 1/4 5/16 5/16 5/32 5/32 Symbol Symbol 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76
Description Qty. 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 Parts includid 19 Gasket for cover 2 19 Gasket for cover 2 19 Seal 1 19 Seal 1 19 Seal 1 in seal kit 20 Gasket for end cover 1 20 Gasket for end cover 1 20 Gasket 4 20 Gasket 4 20 Gasket 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 22 Seal washer 2 22 Seal washer
Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.
L3 394 432 413 451 470 ( ) L4 14.5 14 17.5 17 14 (L4) L3 G: Approx. 300 H: Approx. 600 lead wire length ( ) 2n1-Rc(PT) 1/4 (ports A,B) 73.7 <74.4> [75.3] 52.8 39.8 19 39.4 38.1 (5.4) A B A B A B B B B 1 P 28 28 1 R 20 35 60.7 <64.1> [62.3] 39.8 A A A DIN rail 43.1 51 [Rc(PT) 1/4 port] P = 19 22 32.5 (Voltage rating indication) (5.25) L2 (DIN rail mounting hole pitch 12.5) L1 2n2-One-touch
1(Bleed port) 25-M5 0.8 (Piping port) 7 7 14 28 5-M3 0.5 (Piping port) 19 19 Q Q Series SYJ3000 Power Conserving Type Q Q Power Conserving Type Q Power consumption is decreased one half by reducing the wattage required to hold the valve in an energized state.
-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19
5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 1 1/4 0.3 3/8 1.26 1.06 7/16 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2.4 2 1/4 4 3/4 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 3 1 1/2 0 3/8 1.3 1.06 19/32 3/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2.48 2 3/8 4 7/8 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3.75 1 7/8 0 1/2 1.57 1.18 5/8 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4
Note VF3000 VF5000 Refer to How to Order Pilot Valve Assembly on page 19. Built-in strainer 7 Pilot valve assembly HNBR DXT031-30-11 DXT156-9-8 8 Gasket 1/4: VF5000-71-1; 3/8: VF5000-71-2; 1/2: VF5000-71-3; 9 1/4: VF3000-71-1; 3/8: VF3000-71-2; Aluminum die-casted Sub-plate Caution Round head combination screw (1 pc.)
0.33 6 Individual pressure 3.0 5.0 4.5 0.61 11 6 1.05 19 Note 1) It is a grommet valve.