energy saving effect

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon

0.4

4 VVQC1000-T0-1 Terminal block box housing assembly T kit VVQC1000-L25-0-1 L kit with 0.6 m lead wire !5 VVQC1000-L25-1-1 Lead wire housing assembly L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 VVQC1000-M26-1 Circular connector housing assembly M kit, 26 pins 586 VQC1000/2000 Series Plug-in Unit Base Mounted Manifold Assembly Part No.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Electrical entry Light and surge voltage suppressor Without Symbol Electrical entry Grommet (DC specification) L type plug connector with lead wire L type plug terminal without connector M type plug connector with lead wire M type plug terminal without connector G L LO M MO With Note) Standard lead wire length: 300mm.

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Compact Cylinder

The length of wiring to the load is 5 m or more. 3. The load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-15-44 for details.

XL

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

2 Phase Stepper Motor/Without Motor Brake Series LXS

Allowable Moment (Nm) Allowable static moment Allowable dynamic moment 15.7 7.84 Pitching Yawing LXS Model Load movement direction 1000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment L1 (mm) L3 (mm) a = 1000 to 3000 Pitching a m 500 Mep L1 5 9 0 Transfer load m (kg) 1000 a = 1000 to 3000 Yawing 500 m Mey a L3

SQ1000/2000

L RUN SERIAL UNIT L ERR.

High Vacuum Angle Valve, XL Series

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

7

b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Compact

The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts