Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Speed Controller with Indicator

, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series KP/KPQ/KPG

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

Series KP/KPQ/KPG

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

CQ2

-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 14.6 16.6 21 25.6 41.6 50.6 64 72 10.2 12.2 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 For axis C shaped 5 For axis C shaped 8 For axis C shaped 10 For axis C shaped 10 For axis C shaped

IDG

Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

Series IDG

and 50HM are 03 only.