Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

How to Order M9N A 25 XMD XYD Angle type M9N A 25 In-line type 1 2 3 4 5 6 7 2. Flange type 1. Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

VS 8-2/VS 8-4

When installing a double solenoid or a 3-position configuration, mount the valve so that spool valve is horizontal. Output circuit Surge voltage 24 V 0 V sol.1: Energized 60 V R Internal circuit Surge voltage 0V sol.2: De-energized 60 V R Surge voltage 24 V 0 V Large capacity Load: Energized 60 V R Relay Power supply circuit breaker 24 VDC Figure 1.

Table of Contents

(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] 4(A) (B)2 2(B) (A)4 Apparent power (VA) AC 5(R1) (R2)3 1 (P) (R1)5 1 (P) 3(R2) Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) 3 position exhaust center 3 position exhaust center Surge voltage suppressor Indicator light 4(A) (B)2 2(B) (A)4 Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Electric Actuator with Integrated Guide

(In this case, be sure to connect a reverse voltage suppression diode.) + +V D OUT OV X Relay Other Warning 1.

PF-OMN0009_C

B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

RSQ

B A Through-hole (Standard) Both ends tapped style RHC Note 1) Since 12 uses a common tube for both A and B, only B is used for part no. denotation.

70astamb1

0 i o @1 @2 @3 @0 !6 !3 r !5 u q ye t !9 !8 !4 w !7 CA2 1 CS1 1 MBK32 only A C76 C85 C95 Rod sectional view A-A' A' CP95 NCM !2 !1 Component Parts NCA No. q w e r t y u i o !0 !1 !2 Description Material Note Description Piston nut Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Material Note No.

mb1

6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!0 MB Component Parts No. q w e r t y u i o !0 !1 !2 !3 No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Nominal size (Torque) For 1 piece, a right hand auto switch is installed.

CXWM/CXWL

Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

PF2A/PF2W

output + Analog output (1 to 5 V) NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.

PSxx-OMM0006CN

-"()7 digit() 1 digit=1 kPa 1,2,3,,99,100 1 kPa 15[V] F.S.=514[V] (1F.S.=40.01=0.04[V]) F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF () (30 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () -13No.PS-OMM0006CN-E NPN () () ()()( ) () ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005 V ) 30 ON-OFF ON

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Applicable Auto Switch Model

/D-Y7P(V) D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

Possible to transfer a workpiece at low-speed.

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V IC circuit No 100 V or less 1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 2 1 m type lead wire is only applicable to D-A93. Auto switches marked with a are produced upon receipt of orders.

LEF-OM002xx

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

air-filter-e

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.