Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 13 14 15 16 12 310.5 300 283 13.5 323 312.5 299 12 348 337.5 315 16.5 360.5 350 331 14.5 373 362.5 347 13 40

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 64 40 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 74 50 75,100 66.5 40.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 68 42 10 to 50 63 78 52 9 9 80 92 108 18 8 60 78 52 75,100 For details about the rod end nut and accessory brackets

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 40 64 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 50 74 75,100 40.5 66.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 42 68 10 to 50 63 78 52 9 9 80 92 108 18 8 60 52 78 75,100 For details about the rod end nut and accessory brackets

MLGP

25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke

Slider Type Ball Screw Drive/11-LEFS Series

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200 LEY -X5 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 2000 2000 2000 2000 11LEJS Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0

MLGP

= 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100 100 100 80 CL1 80 50, 63 80 80 MLGC 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 CNG 32, 40 32, 40 32, 40 MNB 25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 =

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Compact

overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] 11 Model Selection MXZ Series For Pressing (Clamping) (1) Confirm that the clamping jig weight and overhang are within the allowable range as shown in the graphs for transfer.

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Made to Order

L1 With coil scraper: C(D)Q2D-XC26C35 Spatter resistant specification for arc welding: CDQ2D-XC26C88/C89/C91 Th9 L2 (L) (A + Stroke) [mm] Bore size Stroke range XC35/XC91 XC88/XC89 A L L1 L2 Th9 A L L1 L2 Th9 Without magnet for auto switch Built-in magnet for auto switch Built-in magnet for auto switch 32 50 or less 116 126 51 33.5 5 23 0 0.052 131 56 38.5 10 23 0 0.052 75, 100 126 40 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

MXW Series Long Stroke Slide Table

=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.