Large blow and

J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 98 Series CHA Dimensions Front trunnion type: CHAU Z 2-Rc P Cushion adjustment screw 4-J Air release GB GB TT V T Width across flats G MM R (max.)

Multistage Ejector (N)ZL Series

performance Air consumption l/min (ANR) (SCFM) Maximum suction flow rate l/min (ANR)(SCFM) Vacuum pressure Q1 Q2 Q3 (N)ZL112 100 (3.5) 200 (7.0) (N)ZL212 63 (2.2) Q1 Q2 Q3 2 stage performance 126 (4.4) 3 stage performance Suction flow rate 250 % suction flow rate increase NEW Series (N)ZL212 Two Parallel 3 Stage Diffusers Integrated for Compact size and large flow rate (twice the flow rate

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

198 225 235.5 169.5 209 237.5 248 180.5 220 250 260.5 57 Manifold Specification Sheet Series VQ1000/Flip, Plug-in Unit 1.

EXxx-OMN0029CN

kbps 0 1 1 2 500 kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON

MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

Micro-Mist Separator with Prefilter Series AMH

=.:.:.::.".'" .' . " . ' O~>-/ 0 0 50 100 150 200 250 0 1000 2000 3000 4000 5000 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH650 AMH250 I I I f-j--+Inlet air pressure 0.3MPa r I I 0.5MPa .'_ ",0.06 Air pressure 0.3MPa /' /0.7MPa a. L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..

MGZ Series

, 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Weight table kg (lb.)

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-32D MHS2-32D 150 150 Pressure 0.6MPa Pressure 0.6MPa 120 120 0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 90 90 0.3MPa 0.3MPa 60 60 0.2MPa 0.2MPa F 30 30 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L mm Gripping point L mm MHS2-40D MHS2-40D 250 250 Pressure 0.6MPa Pressure 0.6MPa 200 200 External gripping

Series MXP Precision Air Slide Table

16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series

LEC-OM02704CN

250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15 0.5 LECSC-S8 LE-S80.9 35 15 0.7 1.

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 160mm